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Microfabricated torsional actuator using self-aligned plastic deformation

Kim, Jongbaeg and Choo, Hyuck and Lin, Liwei and Muller, Richard S. (2003) Microfabricated torsional actuator using self-aligned plastic deformation. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003. Vol.2. IEEE , Piscataway, NJ, pp. 1015-1018. ISBN 0-7803-7731-1.

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We describe microfabricated torsional actuators that are made using self-aligned plastic deformation in a batch process. The microactuators are formed in single-crystal silicon and driven by vertical comb-drives. Structures have been built that resonate at frequencies between 1.90 and 5.33 kHz achieving scanning angles up to 19.2 degrees with driving voltages of 40 V_(dc) plus 13 V_(ac). After continuous testing of 5 billion cycles at the maximum scanning angle, there appears to be no observable degradation or fatigue of the plastically deformed silicon tors ion bars. We present measured results obtained with MEMS scanning mirrors; the actuators may be useful for many other MEMS applications.

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Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2003 IEEE. Paper 3A2.3.
Record Number:CaltechAUTHORS:20150730-144046651
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59089
Deposited On:06 Aug 2015 19:19
Last Modified:10 Nov 2021 22:14

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