Choo, Hyuck and Muller, Richard S. (2003) Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology. In: 2003 IEEE/LEOS International Conference on Optical MEMS. IEEE , Piscataway, NJ, pp. 169-170. ISBN 0-7803-7830-X. https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697
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Abstract
We describe high-precision microlenses with excellent optical characteristics. The lenses are formed precisely at desired locations on a wafer using a polymer-jet system in which hydrophobic effects define the lens diameter and surface tension creates a high-quality optical surface. To make the lenses, we defined hydrophilic circular regions at desired locations using photolithography to pattern a 0.2-pm thick Teflon (hydrophobic) layer on a quartz substrate, as shown in Figures 1 and 2. Then, using a polymer-microjet printing system (Figure 3), we dispense an exact amount of UV-curable polymer within hydrophilic circles to obtain microlenses having desired optical properties [ 13. Figure 4 shows that adjusting the volume of the UV-curable optical epoxy within a hydrophilic circle of a given diameter changes the curvature of the microlens. The step resolution of the microlens volume is determined by the average droplet size (~25pL) of the polymer-jet print head. This hybrid method enables us to define the locations and diameters of microlenses with a ±1 μm precision as well as to control the curvatures of the microlenses accurately.
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Additional Information: | © 2003 IEEE. | |||||||||
DOI: | 10.1109/OMEMS.2003.1233519 | |||||||||
Record Number: | CaltechAUTHORS:20150730-161445697 | |||||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697 | |||||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
ID Code: | 59090 | |||||||||
Collection: | CaltechAUTHORS | |||||||||
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Deposited On: | 06 Aug 2015 19:14 | |||||||||
Last Modified: | 10 Nov 2021 22:14 |
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