Gupta, Kishnan and Choo, Hyuck and Kim, Hanjun and Muller, Richard S. (2003) Micromachined Polarization Beam Splitters for the Visible Spectrum. In: 2003 IEEE/LEOS International Conference on Optical MEMS. IEEE , Piscataway, NJ, pp. 171-172. ISBN 0-7803-7830-X. https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431
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Abstract
We have built and characterized batch-processed polarization beam splitters (PBS), important optical components to separate the orthogonal TE and TM components of light. The devices were fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes, and a triple-layer PBS produced extinction ratios of 21 and 16dB for reflected and transmitted light rays, respectively.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © 2003 IEEE. | |||||||||
| DOI: | 10.1109/OMEMS.2003.1233520 | |||||||||
| Record Number: | CaltechAUTHORS:20150730-163529431 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 59091 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | INVALID USER | |||||||||
| Deposited On: | 06 Aug 2015 19:09 | |||||||||
| Last Modified: | 10 Nov 2021 22:14 |
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