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Micromachined Polarization Beam Splitters for the Visible Spectrum

Gupta, Kishnan and Choo, Hyuck and Kim, Hanjun and Muller, Richard S. (2003) Micromachined Polarization Beam Splitters for the Visible Spectrum. In: 2003 IEEE/LEOS International Conference on Optical MEMS. IEEE , Piscataway, NJ, pp. 171-172. ISBN 0-7803-7830-X .

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We have built and characterized batch-processed polarization beam splitters (PBS), important optical components to separate the orthogonal TE and TM components of light. The devices were fabricated from thin-film, low-stress silicon nitride membranes and showed excellent performance. By stacking membranes, and a triple-layer PBS produced extinction ratios of 21 and 16dB for reflected and transmitted light rays, respectively.

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Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2003 IEEE.
Record Number:CaltechAUTHORS:20150730-163529431
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59091
Deposited By: Kristin Buxton
Deposited On:06 Aug 2015 19:09
Last Modified:08 May 2017 22:58

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