Choo, Hyuck and Muller, Richard S. (2006) Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors. Journal of Microelectromechanical Systems, 15 (6). pp. 1555-1567. ISSN 1057-7157. doi:10.1109/JMEMS.2006.886011. https://resolver.caltech.edu/CaltechAUTHORS:20150730-165049120
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Abstract
In this paper, we have demonstrated an addressable array (5-by-5) of high-quality microlenses suitable for application in a Shack–Hartmann (SH) sensor in a microoptical system. Specific lenses in the array can be addressed using a new selection scheme (that we have designed, built, and tested) in which the mechanical resonant frequencies of individual lens-support carriages are varied. Thus, by changing the frequency of the drive voltage, we require only two electrical connections per row in the lens system to identify the selected lens by its resonating focal image. We show that using this lens-identification method will allow us to improve the dynamic range of SH sensors by a factor of 12–46 above values reported for conventional SH designs.
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| Additional Information: | © 2006 IEEE. Manuscript received February 7, 2006; revised June 27, 2006. This paper was presented in part at the 2004 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC June 6–10 2004. Subject Editor C. Hierold. | |||||||||
| Subject Keywords: | Dynamic range, frequency addressing, microlens, optical microelectromechanical systems (MEMS), Shack–Hartmann (SH) sensor | |||||||||
| Issue or Number: | 6 | |||||||||
| DOI: | 10.1109/JMEMS.2006.886011 | |||||||||
| Record Number: | CaltechAUTHORS:20150730-165049120 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20150730-165049120 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 59093 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | INVALID USER | |||||||||
| Deposited On: | 07 Aug 2015 18:44 | |||||||||
| Last Modified: | 10 Nov 2021 22:14 |
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