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Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon

Kim, Jongbaeg and Choo, Hyuck and Lin, Liwei and Muller, Richard S. (2006) Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon. Journal of Microelectromechanical Systems, 15 (3). pp. 553-562. ISSN 1057-7157. doi:10.1109/JMEMS.2006.876789.

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In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40V_(dc) plus 13V_(pp). After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.

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Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2006 IEEE. Manuscript received March 18, 2005; revised November 10, 2005. This paper was presented in part at the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03, Boston, MA, June 9–12, 2003). Subject Editor H. Zappe.
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Record Number:CaltechAUTHORS:20150730-165132033
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ID Code:59094
Deposited On:07 Aug 2015 18:47
Last Modified:10 Nov 2021 22:14

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