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Diamagnetically Levitated MEMS Accelerometers

Garmire, D. and Choo, H. and Kant, R. and Govindjee, S. and Séquin, C. H. and Muller, R. S. and Demmel, J. (2007) Diamagnetically Levitated MEMS Accelerometers. In: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE , Piscataway, NJ, pp. 1203-1206. ISBN 1-4244-0842-3.

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We introduce the theory and a proof-of-concept design for MEMS-based, diamagnetically-levitated accelerometers. The theory includes an equation for determining the diamagnetic force above a checkerboard configuration of magnets. We demonstrate both electronic probing and a rapid MEMS-based interferometer technique for position sensing of the proof mass. Through a proof-of-concept design, we show electrostatic-measurement sensitivity achieving 34 μg at a 0.1 V sense signal and interferometer-measurement sensitivity achieving 6 μg for in-plane vibrations at 5 Hz. We conclude by outlining batch-fabrication steps to produce levitated accelerometers.

Item Type:Book Section
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Choo, H.0000-0002-8903-7939
Additional Information:© 2007 IEEE.
Subject Keywords:accelerometer, diamagnetism, levitation, fast phase-shifting interferometer
Record Number:CaltechAUTHORS:20150731-110120088
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59107
Deposited By: Kristin Buxton
Deposited On:06 Aug 2015 18:51
Last Modified:10 Nov 2021 22:15

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