Garmire, D. and Choo, H. and Kant, R. and Govindjee, S. and Séquin, C. H. and Muller, R. S. and Demmel, J. (2007) Diamagnetically Levitated MEMS Accelerometers. In: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE , Piscataway, NJ, pp. 1203-1206. ISBN 1-4244-0842-3. https://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088
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Abstract
We introduce the theory and a proof-of-concept design for MEMS-based, diamagnetically-levitated accelerometers. The theory includes an equation for determining the diamagnetic force above a checkerboard configuration of magnets. We demonstrate both electronic probing and a rapid MEMS-based interferometer technique for position sensing of the proof mass. Through a proof-of-concept design, we show electrostatic-measurement sensitivity achieving 34 μg at a 0.1 V sense signal and interferometer-measurement sensitivity achieving 6 μg for in-plane vibrations at 5 Hz. We conclude by outlining batch-fabrication steps to produce levitated accelerometers.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © 2007 IEEE. | |||||||||
| Subject Keywords: | accelerometer, diamagnetism, levitation, fast phase-shifting interferometer | |||||||||
| DOI: | 10.1109/SENSOR.2007.4300352 | |||||||||
| Record Number: | CaltechAUTHORS:20150731-110120088 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 59107 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Kristin Buxton | |||||||||
| Deposited On: | 06 Aug 2015 18:51 | |||||||||
| Last Modified: | 10 Nov 2021 22:15 |
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