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Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer

Kant, R. and Garmire, D. and Choo, H. and Muller, R. S. (2007) Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer. In: 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics. IEEE , Piscataway, NJ, pp. 57-58. ISBN 978-1-4244-0641-8 .

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We describe and present detailed performance characterizations for an enhanced version of our MEMS-Based Phase-Shifting Interferometer (MBPSI) that achieves 13 times denser motion reconstruction than our original system. We measure the noise level to be ≤±6 nm λ for a 660 nm laser), and the frequency-resolution to be ≤ 0.03Hz for 31Hz motion captured at 300Hz. We have successfully tracked a piezo-based actuator, driven with an arbitrary waveform composed of transients ≤10Hz.

Item Type:Book Section
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Choo, H.0000-0002-8903-7939
Additional Information:© 2007 IEEE.
Subject Keywords:optical MEMS, Phase-shifting, interferometer, transient motion
Record Number:CaltechAUTHORS:20150731-110953413
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:59108
Deposited By: Kristin Buxton
Deposited On:06 Aug 2015 17:43
Last Modified:08 May 2017 23:05

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