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Aerosol reactor production of uniform submicron powders

Flagan, Richard C. and Wu, Jin J. (1991) Aerosol reactor production of uniform submicron powders. Patent number: US 4,994,107.

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A method of producing submicron nonagglomerated particles in a single stage reactor includes introducing a reactant or mixture of reactants at one end while varying the temperature along the reactor to initiate reactions at a low rate. As homogeneously small numbers of seed particles generated in the initial section of the reactor progress through the reactor, the reaction is gradually accelerated through programmed increases in temperature along the length of the reactor to promote particle growth by chemical vapor deposition while minimizing agglomerate formation by maintaining a sufficiently low number concentration of particles in the reactor such that coagulation is inhibited within the residence time of particles in the reactor. The maximum temperature and minimum residence time is defined by a combination of temperature and residence time that is necessary to bring the reaction to completion. In one embodiment, electronic grade silane and high purity nitrogen are introduced into the reactor and temperatures of approximately 770° K. to 1550° K. are employed. In another embodiment silane and ammonia are employed at temperatures from 750° K. to 1800° K.

Item Type:Patent
Patent Classification:Current U.S. Class: 75/367; 423/349; 423/350; 423/409; 423/439; 427/213; 427/214; 427/215. Current CPC Class: B22F 9/12 (20130101); B82Y 30/00 (20130101); C01B 21/068 (20130101); C01B 31/30 (20130101); C01B 33/029 (20130101); C01P 2004/64 (20130101); C01P 2004/03 (20130101); C01P 2004/51 (20130101); C01P 2004/61 (20130101); C01P 2004/62 (20130101). Current International Class: B22F 9/02 (20060101); B22F 9/12 (20060101); C01B 33/00 (20060101); C01B 33/029 (20060101); C01B 31/00 (20060101); C01B 31/30 (20060101); C01B 21/068 (20060101); C01B 21/00 (20060101); C01B 033/02 (); C22C 001/04 (); B05D 007/00 ().
Patent Assignee:California Institute of Technology
Related URLs:
URLURL TypeDescription Patents site Patent Office (European Patent Office)
Flagan, Richard C.0000-0001-5690-770X
Additional Information:Publication number US 4,994,107. Publication type Grant. Publication date February 19, 1991. Application number US 07/248,486. Application publication date Oct. 14, 2010. Filing date Sept. 8, 1988. Priority date July 9, 1986. Government Interests: The invention described herein was made in the performance of work supported in part by the Flat Plate Solar Array Project, Jet Propulsion Laboratory, California Institute of Technology, sponsored by the U.S. Department of Energy through an agreement with NASA. Parent Case Text: This application is a continuation of application Ser. No. 06/883,573 filed July 9, 1986, now abandoned.
Record Number:CaltechAUTHORS:20150909-161357428
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:60147
Deposited By: Irina Meininger
Deposited On:22 Dec 2015 19:38
Last Modified:03 Oct 2019 08:54

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