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Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors

Choo, Hyuck and Muller, Richard S. (2004) Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors. In: Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004 : technical digest. Transducers Research Foundation , Cleveland, OH. ISBN 0964002450.

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We demonstrate an addressable array (5-by-5) of high-quality microlenses applied to a Shack-Hartmann (SH) sensor in a microoptical system. Specific lenses in the array can be addressed using a new selection scheme (that we have designed, built, and tested) in which the mechanical resonant frequencies of individual lenssupport carriages are varied. Thus, by changing the frequency of the drive voltage, we require only two electrical connections per row in the lens system to identify the selected lens by its resonating focal image. We show that using this lensidentification method allows us to improve the dynamic range of Shack-Hartmann sensors by 2600-4600% over values attained in conventional SH designs.

Item Type:Book Section
Choo, Hyuck0000-0002-8903-7939
Additional Information:© 2004 Transducers Research Foundation. The authors would like to thank Joseph Seeger for technical discussions on actuator design, Hanjun Kim of Hewlett Packard Lab (Palo Alto, CA) for helpful discussion on nitride-membrane fabrication, and Justin Black for wire-bonding. This project has been funded by the Berkeley Sensor & Actuator Center. Travel support has been generously provided by the Transducers Research Foundation and by the DARPA MEMS and DARPA BioFlips programs.
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Berkeley Sensor & Actuator CenterUNSPECIFIED
Transducers Research FoundationUNSPECIFIED
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Record Number:CaltechAUTHORS:20150915-164937836
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ID Code:60267
Deposited On:16 Sep 2015 02:50
Last Modified:03 Oct 2019 08:55

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