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Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Suzuki, Yuji and Tai, Yu-Chong (2006) Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers. Journal of Microelectromechanical Systems, 15 (5). pp. 1364-1370. ISSN 1057-7157. doi:10.1109/JMEMS.2006.879706.

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A new microfabrication technology for high-aspect-ratio parylene structure has been developed for soft spring applications. Free-standing parylene beams with widths of 10–40 µm and aspect ratios of 10–20 have been successfully fabricated. Since parylene has a small Young's modulus, a high-aspect-ratio beam with a spring constant of the order of 1 × 10^(-3) N/m has been realized. The large yield strain of parylene enables a test structure to have a large-amplitude oscillation of 600 µm_(p-p), without any failure of the high-aspect-ratio springs. An early prototype of in-plane capacitive accelerometer was also developed. It was found that its resonant frequency is as low as 37 Hz, and the noise spectral density is 64 µg/(Hz)^(0.5).

Item Type:Article
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2006 IEEE. Reprinted with permission. Manuscript received May 18, 2005; revised January 20, 2006. [Posted online: 2006-10-30] This work was supported by the NSF Engineering Research Center (ERC), California Institute of Technology, Pasadena. The work of Y. Suzuki was supported by Professor N. Kasagi of the University of Tokyo. Subject Editor R. R. A. Syms.
Funding AgencyGrant Number
Center for Neuromorphic Systems Engineering, CaltechUNSPECIFIED
University of TokyoUNSPECIFIED
Subject Keywords:Capacitive accelerometer, high-aspect-ratio beam, low spring constant, parylene
Issue or Number:5
Record Number:CaltechAUTHORS:SUZjmems06
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:6043
Deposited By: Archive Administrator
Deposited On:15 Nov 2006
Last Modified:08 Nov 2021 20:30

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