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Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

Zhou, Lan and Suram, Santosh K. and Becerra-Stasiewicz, Natalie and Mitrovic, Slobodan and Kan, Kevin and Jones, Ryan J. R. and Gregoire, John M. (2015) Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides. Journal of Materials Research, 30 (19). pp. 2928-2933. ISSN 0884-2914. https://resolver.caltech.edu/CaltechAUTHORS:20151019-090734492

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Abstract

Recent efforts have demonstrated enhanced tailoring of material functionality with mixed anion materials, yet exploratory research with mixed anion chemistries is limited by the sensitivity of these materials to synthesis conditions. Synthesis of a particular metal oxynitride compound by traditional reactive annealing requires specific, limited ranges of both oxygen and nitrogen chemical potentials to establish equilibrium between the solid-state material and a reactive atmosphere. Using Ta–O–N as an example system, we describe a combination of reactive sputter deposition and rapid thermal processing (RTP) for synthesis of mixed anion inorganic materials. Heuristic optimization of reactive gas pressures to attain a desired anion stoichiometry is discussed, and the ability of RTP to enable amorphous to crystalline transitions without preferential anion loss is demonstrated through the controlled synthesis of nitride, oxide, and oxynitride phases.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1557/jmr.2015.140DOIArticle
http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=9994348&fileId=S0884291415001405PublisherArticle
ORCID:
AuthorORCID
Zhou, Lan0000-0002-7052-266X
Suram, Santosh K.0000-0001-8170-2685
Mitrovic, Slobodan0000-0001-8913-8505
Jones, Ryan J. R.0000-0002-4629-3115
Gregoire, John M.0000-0002-2863-5265
Additional Information:© 2015 Materials Research Society. Received 15 February 2015; accepted 28 April 2015. Published online: 27 May 2015. This study is based upon work performed by the Joint Center for Artificial Photosynthesis, a DOE Energy Innovation Hub, supported through the Office of Science of the U.S. Department of Energy (Award No. DESC0004993). The authors thank the Kurt J. Lesker company for assistance with the design of the custom PVD gas handling system.
Group:JCAP
Funders:
Funding AgencyGrant Number
Department of Energy (DOE)DE-SC0004993
Subject Keywords:oxynitrides; sputtering; rapid thermal processing; mixed anion synthesis
Issue or Number:19
Record Number:CaltechAUTHORS:20151019-090734492
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20151019-090734492
Official Citation:Lan Zhou, Santosh K. Suram, Natalie Becerra-Stasiewicz, Slobodan Mitrovic, Kevin Kan, Ryan J.R. Jones and John M. Gregoire (2015). Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides. Journal of Materials Research, 30, pp 2928-2933. doi:10.1557/jmr.2015.140.
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:61242
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:19 Oct 2015 16:23
Last Modified:09 Mar 2020 13:19

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