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Electron collision cross sections for tetraethoxysilane

Morgan, W. Lowell and Winstead, Carl and McKoy, Vincent (2002) Electron collision cross sections for tetraethoxysilane. Journal of Applied Physics, 92 (3). pp. 1663-1667. ISSN 0021-8979. doi:10.1063/1.1491024. https://resolver.caltech.edu/CaltechAUTHORS:20151027-154126740

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Abstract

We describe the development of a consistent set of low-energy electron-collision cross sections for tetraethoxysilane, also known as tetraethylorthosilicate. Ab initio calculations are used to obtain the elastic and momentum-transfer cross sections. These are combined with measured values of the ionization cross section and with model vibrational and electronic excitation cross sections to form a preliminary cross section set, which is then adjusted to achieve consistency with measured swarm parameters.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.1491024DOIArticle
http://scitation.aip.org/content/aip/journal/jap/92/3/10.1063/1.1491024PublisherArticle
Additional Information:© 2002 American Institute of Physics. (Received 25 February 2002; accepted for publication 10 May 2002) This work was supported by SEMATECH, Inc. Work at the California Institute of Technology was also supported by the Department of Energy, Office of Basic Energy Sciences, and by an equipment grant from Intel Corp. Cross section calculations made use of the facilities of the Caltech Center for Advanced Computational Research, which is supported in part by the National Science Foundation.
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Funding AgencyGrant Number
Sematech, Inc.UNSPECIFIED
Department of Energy (DOE)UNSPECIFIED
IntelUNSPECIFIED
NSFUNSPECIFIED
Issue or Number:3
DOI:10.1063/1.1491024
Record Number:CaltechAUTHORS:20151027-154126740
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20151027-154126740
Official Citation:Electron collision cross sections for tetraethoxysilane Morgan, W. Lowell and Winstead, Carl and McKoy, Vincent, Journal of Applied Physics, 92, 1663-1667 (2002), DOI:http://dx.doi.org/10.1063/1.1491024
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:61599
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:28 Oct 2015 22:35
Last Modified:10 Nov 2021 22:51

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