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Electron cross section set for CHF_3

Morgan, W. Lowell and Winstead, Carl and McKoy, Vincent (2001) Electron cross section set for CHF_3. Journal of Applied Physics, 90 (4). pp. 2009-2016. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:20151027-154129341

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Abstract

We describe the development of a consistent set of low-energy electron collision cross sections for trifluoromethane, CHF_3. First-principles calculations are used to obtain key elastic and inelastic cross sections. These are combined with literature values of the ionization cross section and with vibrational excitation cross sections obtained from the Born approximation to form a preliminary set, which is then adjusted to achieve consistency with measured swarm parameters.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.1382833DOIArticle
http://scitation.aip.org/content/aip/journal/jap/90/4/10.1063/1.1382833PublisherArticle
Alternate Title:Electron cross section set for CHF3
Additional Information:© 2001 American Institute of Physics. (Received 2 February 2001; accepted for publication 7 May 2001) This research was supported by Sematech, Inc. Work at Caltech was also supported by the Office of Basic Energy Sciences of the Department of Energy and by an equipment grant from Intel Corp. Calculations reported here made use of the facilities of the Caltech Center for Advanced Computing Research and of the Jet Propulsion Laboratory’s Supercomputing Project. The authors would like to thank Dr. Sadasivan Shankar of Intel Corp. for useful discussions and for his interest throughout the course of this work.
Funders:
Funding AgencyGrant Number
Sematech, Inc.UNSPECIFIED
Department of Energy (DOE)UNSPECIFIED
IntelUNSPECIFIED
Issue or Number:4
Record Number:CaltechAUTHORS:20151027-154129341
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20151027-154129341
Official Citation:Electron cross section set for CHF3 Morgan, W. Lowell and Winstead, Carl and McKoy, Vincent, Journal of Applied Physics, 90, 2009-2016 (2001), DOI:http://dx.doi.org/10.1063/1.1382833
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:61607
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:28 Oct 2015 15:22
Last Modified:03 Oct 2019 09:09

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