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Electron transport properties and collision cross sections in C_2F_4

Yoshida, K. and Goto, S. and Tagashira, H. and Winstead, C. and McKoy, B. V. and Morgan, W. L. (2002) Electron transport properties and collision cross sections in C_2F_4. Journal of Applied Physics, 91 (5). pp. 2637-2647. ISSN 0021-8979. doi:10.1063/1.1433189. https://resolver.caltech.edu/CaltechAUTHORS:20151028-114742602

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Abstract

We have measured the electron drift velocity, longitudinal diffusion coefficient, and ionization coefficient in tetrafluoroethene (C_2F_4). Using these data and the results of ab initio calculations of the elastic, momentum-transfer, and neutral-excitation cross sections, along with measurements of the partial ionization cross sections, we have performed a swarm analysis in order to construct a self-consistent set of electron impact cross sections for C_2F_4. The swarm analysis consists of solutions to Boltzmann’s equation for electrons in C_2F_4 for values of E/N⩽500Td and direct Monte Carlo simulation of electron transport in C_2F_4 for 500Td⩽E/N⩽2000Td. We present an analysis and discussion of the sensitivity of cross sections derived from swarm data to uncertainties in the electron transport measurements. We also discuss the failure of the two-term spherical harmonic solution to Boltzmann’s equation for E/N>500Td, which necessitated the use of Monte Carlo simulations for high values of E/N.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1063/1.1433189DOIArticle
http://scitation.aip.org/content/aip/journal/jap/91/5/10.1063/1.1433189PublisherArticle
Alternate Title:Electron transport properties and collision cross sections in C2F4
Additional Information:© 2002 American Institute of Physics. (Received 20 August 2001; accepted for publication 13 November 2001) The authors would like to thank Dr. Peter Ventzek of Motorola, Inc., for his interest in and encouragement of this work. Work at Caltech was supported by the Office of Basic Energy Sciences of the U.S. Department of Energy, by Sematech, Inc., and an equipment grant from Intel Corp.
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Funding AgencyGrant Number
Department of Energy (DOE)UNSPECIFIED
Sematech, Inc.UNSPECIFIED
IntelUNSPECIFIED
Issue or Number:5
DOI:10.1063/1.1433189
Record Number:CaltechAUTHORS:20151028-114742602
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20151028-114742602
Official Citation:Electron transport properties and collision cross sections in C2F4 Yoshida, K. and Goto, S. and Tagashira, H. and Winstead, C. and McKoy, B. V. and Morgan, W. L., Journal of Applied Physics, 91, 2637-2647 (2002), DOI:http://dx.doi.org/10.1063/1.1433189
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:61685
Collection:CaltechAUTHORS
Deposited By: George Porter
Deposited On:28 Oct 2015 20:54
Last Modified:10 Nov 2021 22:52

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