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Integrated MEMS metrology device using complementary measuring combs

Garmire, David and Choo, Hyuck and Muller, Richard S. and Demmel, James and Govindjee, Sanjay (2011) Integrated MEMS metrology device using complementary measuring combs. Patent number: US 8,079,246.

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The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.

Item Type:Patent
Related Patents:US20090322365, WO2007124357A2, WO2007124357A3, WO2007124357A9
Patent Classification:U.S. Classification: 73/1.79, 73/514.32, 324/750.3, 73/504.14. International Classification: G01P21/00, B81C99/00. Cooperative Classification: B81C99/005, G02B26/0841, H02N1/008. European Classification: B81C99/00L6, H02N1/00B2C.
Patent Assignee:Regents of the University of California
Related URLs:
URLURL TypeDescription Patents site,079,246.PN.&OS=PN/8,079,246&RS=PN/8,079,246PatentU.S. Patent Office (European Patent Office)
Choo, Hyuck0000-0002-8903-7939
Additional Information:Publication number US8079246 B2. Publication type Grant. Application number US 11/737,532. Publication date Dec 20, 2011. Application publication date Dec 31, 2009. Filing date Apr 19, 2007. Priority date Apr 19, 2006. Government interests: This invention was made with Government support under NSF Grant Nos. EIA-0122599 and EEC-0318642. The Government has certain rights to this invention. Parent case: This application claims the benefit of priority from U.S. provisional patent application No. 60/793,424, filed Apr. 19, 2006, the entirety of which is incorporated herein by reference.
Funding AgencyGrant Number
Record Number:CaltechAUTHORS:20151029-165522961
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:61725
Deposited By: Katherine Johnson
Deposited On:04 Nov 2015 23:36
Last Modified:03 Oct 2019 09:11

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