MEMS-based, phase-shifting interferometer

Choo, Hyuck and Muller, Richard S. and Garmire, David and Demmel, James W. and Kant, Rishi (2009) MEMS-based, phase-shifting interferometer. Patent number: US 7,564,559. https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584

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Abstract

Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.

Item Type:

Patent

Related Patents:

US20070279638

Patent Classification:

U.S. Classification: 356/450, 356/35.5. International Classification: G01L1/24, G01B9/02. Cooperative Classification: G01B9/02014, G01B2290/70, G01B9/02069, G01J3/4532, G01J9/02, G01B11/2441. European Classification: G01B11/24H, G01B9/02, G01J9/02, G01.

Patent Assignee:

The Regents of the University of California

Related URLs:

URL	URL Type	Description
https://www.google.com/patents/US7564559	Patent	Google Patents site
http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=7,564,559.PN.&OS=PN/7,564,559&RS=PN/7,564,559	Patent	U.S. Patent Office
http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=7564559B2&KC=B2&FT=D	Patent	Espacenet (European Patent Office)

ORCID:

Author	ORCID
Choo, Hyuck	0000-0002-8903-7939

Additional Information:

Publication number US7564559 B2. Publication type Grant. Application number US 11/446,552. Publication date Jul 21, 2009. Application publication date Dec 6, 2007 Filing date Jun 2, 2006. Priority date Jun 2, 2006. Government interests: The invention was funded in part by Grant Nos. EIA-0122599 awarded by the National Science Foundation and by Grant No. EEC-0318642 awarded by the National Science Foundation. The government may have certain rights in the invention.

Funders:

Funding Agency	Grant Number
NSF	EIA-0122599
NSF	EEC-0318642

Record Number:

CaltechAUTHORS:20151104-160949584

Persistent URL:

https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584

Usage Policy:

No commercial reproduction, distribution, display or performance rights in this work are provided.

ID Code:

61863

Collection:

CaltechAUTHORS

Deposited By:

Katherine Johnson

Deposited On:

05 Nov 2015 00:19

Last Modified:

03 Oct 2019 09:12

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