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MEMS-based, phase-shifting interferometer

Choo, Hyuck and Muller, Richard S. and Garmire, David and Demmel, James W. and Kant, Rishi (2009) MEMS-based, phase-shifting interferometer. Patent number: US 7,564,559.

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Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.

Item Type:Patent
Related Patents:US20070279638
Patent Classification:U.S. Classification: 356/450, 356/35.5. International Classification: G01L1/24, G01B9/02. Cooperative Classification: G01B9/02014, G01B2290/70, G01B9/02069, G01J3/4532, G01J9/02, G01B11/2441. European Classification: G01B11/24H, G01B9/02, G01J9/02, G01.
Patent Assignee:The Regents of the University of California
Related URLs:
URLURL TypeDescription Patents site,564,559.PN.&OS=PN/7,564,559&RS=PN/7,564,559PatentU.S. Patent Office (European Patent Office)
Choo, Hyuck0000-0002-8903-7939
Additional Information:Publication number US7564559 B2. Publication type Grant. Application number US 11/446,552. Publication date Jul 21, 2009. Application publication date Dec 6, 2007 Filing date Jun 2, 2006. Priority date Jun 2, 2006. Government interests: The invention was funded in part by Grant Nos. EIA-0122599 awarded by the National Science Foundation and by Grant No. EEC-0318642 awarded by the National Science Foundation. The government may have certain rights in the invention.
Funding AgencyGrant Number
Record Number:CaltechAUTHORS:20151104-160949584
Persistent URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:61863
Deposited By: Katherine Johnson
Deposited On:05 Nov 2015 00:19
Last Modified:03 Oct 2019 09:12

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