Choo, Hyuck and Muller, Richard S. and Garmire, David and Demmel, James W. and Kant, Rishi (2009) MEMS-based, phase-shifting interferometer. Patent number: US 7,564,559. https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584
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PDF (Patent No.: US 7,564,559 B2)
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PDF (Application US 2007/0279638 A1)
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Abstract
Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.
Item Type: | Patent | ||||||||||||
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Related Patents: | US20070279638 | ||||||||||||
Patent Classification: | U.S. Classification: 356/450, 356/35.5. International Classification: G01L1/24, G01B9/02. Cooperative Classification: G01B9/02014, G01B2290/70, G01B9/02069, G01J3/4532, G01J9/02, G01B11/2441. European Classification: G01B11/24H, G01B9/02, G01J9/02, G01. | ||||||||||||
Patent Assignee: | The Regents of the University of California | ||||||||||||
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Additional Information: | Publication number US7564559 B2. Publication type Grant. Application number US 11/446,552. Publication date Jul 21, 2009. Application publication date Dec 6, 2007 Filing date Jun 2, 2006. Priority date Jun 2, 2006. Government interests: The invention was funded in part by Grant Nos. EIA-0122599 awarded by the National Science Foundation and by Grant No. EEC-0318642 awarded by the National Science Foundation. The government may have certain rights in the invention. | ||||||||||||
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Record Number: | CaltechAUTHORS:20151104-160949584 | ||||||||||||
Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584 | ||||||||||||
Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||||
ID Code: | 61863 | ||||||||||||
Collection: | CaltechAUTHORS | ||||||||||||
Deposited By: | Katherine Johnson | ||||||||||||
Deposited On: | 05 Nov 2015 00:19 | ||||||||||||
Last Modified: | 03 Oct 2019 09:12 |
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