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Thin Films and Solid-Phase Reactions

Mayer, James W. and Poate, John M. and Tu, King-Ning (1975) Thin Films and Solid-Phase Reactions. Science, 190 (4211). pp. 228-234. ISSN 0036-8075. http://resolver.caltech.edu/CaltechAUTHORS:20151109-144638835

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Abstract

Thin films play a dominant role in modern technology. They appear as vital elements in integrated circuits as well as superconducting elements and solar energy conversion structures. Thin films are used both as active structures of precisely controlled thickness and area, and passive structures for connection to, or isolation from, the outside world.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1126/science.190.4211.228DOIArticle
http://www.sciencemag.org/content/190/4211/228PublisherArticle
http://www.jstor.org/stable/1740044JSTORArticle
Additional Information:© 1975 American Association for the Advancement of Science. We acknowledge the contributions of our colleagues at Bell Laboratories, IBM-Watson Research Center, and Caltech to many of the concepts presented here. The Caltech work was supported by grants from the Ford Motor Foundation and the Office of Naval Research (L. Cooper). The IBM work was supported in part by ARPA contract F19628-74-C-0077.
Funders:
Funding AgencyGrant Number
Ford Motor FoundationUNSPECIFIED
Office of Naval Research (ONR)UNSPECIFIED
Advanced Research Projects Agency (ARPA)F19628-74-C-0077
Record Number:CaltechAUTHORS:20151109-144638835
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20151109-144638835
Official Citation:Thin Films and Solid-Phase Reactions James W. Mayer, John M. Poate, and King-Ning Tu Science 17 October 1975: 190 (4211), 228-234. [DOI:10.1126/science.190.4211.228]
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:62004
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:09 Nov 2015 22:55
Last Modified:09 Nov 2015 22:55

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