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A new technique for the measurement of sputtering yields

Switkowski, Z. E. and Mann, F. M. and Kneff, D. W. and Ollerhead, R. W. and Tombrello, T. A. (1976) A new technique for the measurement of sputtering yields. Radiation Effects, 29 (2). pp. 65-70. ISSN 0033-7579.

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We have measured the yields of 90 keV ^(40)Ar^+ and ^4He^+ sputtering of Mo and V samples by the use of a new radio-tracer technique. This technique involves activating the samples by high-energy charged-particle irradiation before sputtering, and using conventional γ-ray counting methods to analyze the material subsequently sputtered onto collector foils. We have also measured angular distributions of the sputtered material, and compared these results and our total sputtering yields with the predictions of Sigmund's sputtering theory. Further comparisons between our radiotracer results and those obtained for ^(40)Ar^+ sputtering of unactivated Mo and V samples, determined from elastic backscattering measurements using 12 MeV ^(16)O ions, show that the techniques give consistent results.

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Additional Information:© 1976 Gordon and Breach Science Publishers Ltd. Received September 17, 1975; and in revised form November 21 , 1975. Supported by the National Science Foundation [MPS7l-02670 A05, GP-43585] and the Ford Motor Company. We would like to thank Dr. P. K. Haff for many stimulating discussions and M. R. Weller for help with the data reduction. We gratefully acknowledge the considerable efforts of R. Gregg in designing and assembling the ultra-high vacuum system.
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NSFMPS71-02670 A05
Ford Motor CompanyUNSPECIFIED
Issue or Number:2
Record Number:CaltechAUTHORS:20151109-145649325
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:62006
Deposited By: Ruth Sustaita
Deposited On:09 Nov 2015 23:22
Last Modified:03 Oct 2019 09:14

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