A Caltech Library Service

Superconducting cavity-electromechanics on silicon-on-insulator

Dieterle, Paul B. and Kalaee, Mahmoud and Fink, Johannes M. and Painter, Oskar (2016) Superconducting cavity-electromechanics on silicon-on-insulator. Physical Review Applied, 6 (1). Art. No. 014013. ISSN 2331-7019. doi:10.1103/PhysRevApplied.6.014013.

[img] PDF - Published Version
See Usage Policy.

[img] PDF - Submitted Version
See Usage Policy.


Use this Persistent URL to link to this item:


Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-Q aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this fabrication process, a high-impedance 8.9-GHz coil resonator is coupled capacitively with a large participation ratio to a 9.7-MHz micromechanical resonator. Two-tone microwave spectroscopy and radiation pressure backaction are used to characterize the coupled system in a dilution refrigerator down to temperatures of T_f=11  mK, yielding a measured electromechanical vacuum coupling rate of g_0/2π = 24.6  Hz and a mechanical resonator Q factor of Q_m = 1.7 × 10^7. Microwave backaction cooling of the mechanical resonator is also studied, with a minimum phonon occupancy of n_m ≈ 16 phonons being realized at an elevated fridge temperature of T_f = 211  mK.

Item Type:Article
Related URLs:
URLURL TypeDescription Paper
Fink, Johannes M.0000-0001-8112-028X
Painter, Oskar0000-0002-1581-9209
Additional Information:© 2016 American Physical Society. (Received 15 January 2016; revised manuscript received 27 June 2016; published 22 July 2016) The authors would like to thank Dan Vestyck at SPTS for performing trial HF vapor etch fabrication runs, and Barry Baker for his good humor and tireless effort to get the HF vapor etcher set up at Caltech. The authors also thank Alessandro Pitanti and Richard Norte for their contributions to initial fabrication development in SOI. This work was supported by the AFOSR through the “Wiring Quantum Networks with Mechanical Transducers” MURI program, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. P. B. D. acknowledges support from a Barry Goldwater Scholarship. P. B. D and M. K. contributed equally to this work.
Group:Kavli Nanoscience Institute, Institute for Quantum Information and Matter
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)UNSPECIFIED
Institute for Quantum Information and Matter (IQIM)UNSPECIFIED
NSF Physics Frontiers CenterUNSPECIFIED
Gordon and Betty Moore FoundationUNSPECIFIED
Kavli Nanoscience InstituteUNSPECIFIED
Barry M. Goldwater ScholarshipUNSPECIFIED
Issue or Number:1
Record Number:CaltechAUTHORS:20160202-152402349
Persistent URL:
Official Citation:Superconducting Cavity Electromechanics on a Silicon-on-Insulator Platform Paul B. Dieterle, Mahmoud Kalaee, Johannes M. Fink, and Oskar Painter Phys. Rev. Applied 6, 014013
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:64173
Deposited By: Joy Painter
Deposited On:03 Feb 2016 00:02
Last Modified:10 Nov 2021 23:26

Repository Staff Only: item control page