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Frequency fluctuations in silicon nanoresonators

Sansa, Marc and Sage, Eric and Bullard, Elizabeth C. and Gély, Marc and Alava, Thomas and Colinet, Eric and Naik, Akshay K. and Villanueva, Luis Guillermo and Duraffourg, Laurent and Roukes, Michael L. and Jourdan, Guillaume and Hentz, Sébastien (2016) Frequency fluctuations in silicon nanoresonators. Nature Nanotechnology, 11 (6). pp. 552-558. ISSN 1748-3387. PMCID PMC4892353. doi:10.1038/NNANO.2016.19.

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Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard fluctuations in the mechanical frequency response, these fluctuations have recently attracted considerable theoretical interest. However, their existence is very difficult to demonstrate experimentally. Here, through a literature review, we show that all studies of frequency stability report values several orders of magnitude larger than the limit imposed by thermomechanical noise. We studied a monocrystalline silicon nanoresonator at room temperature and found a similar discrepancy. We propose a new method to show that this was due to the presence of frequency fluctuations, of unexpected level. The fluctuations were not due to the instrumentation system, or to any other of the known sources investigated. These results challenge our current understanding of frequency fluctuations and call for a change in practices.

Item Type:Article
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URLURL TypeDescription ReadCube access CentralArticle Paper
Sansa, Marc0000-0003-4419-3871
Gély, Marc0000-0003-2801-268X
Alava, Thomas0000-0001-6944-0897
Naik, Akshay K.0000-0001-6325-7231
Villanueva, Luis Guillermo0000-0003-3340-2930
Duraffourg, Laurent0000-0002-9829-9295
Roukes, Michael L.0000-0002-2916-6026
Jourdan, Guillaume0000-0002-0944-8640
Hentz, Sébastien0000-0003-0479-9027
Additional Information:© 2016 Macmillan Publishers Limited. Received 09 July 2015; Accepted 25 January 2016; Published online 29 February 2016. The authors acknowledge partial support from the LETI Carnot Institute NEMS-MS project, as well as from the European Union through the ERC Enlightened project (616251) and the Marie-Curie Eurotalents outgoing (S.H.) and incoming (M.S.) fellowships. The authors thank C. Marcoux and C. Dupré for their support with device fabrication. L.G.V. acknowledges financial support from the Swiss National Science Foundation (PP00P2-144695) and the European Commission (PCIG14-GA-2013-631801). A.K.N. acknowledges financial support from the Indian Institute of Science, Bangalore. Author contributions: M.S. performed all experiments and processed the data. M.S., G.J., A.K.N. and S.H. conceived and designed the experiments. L.G.V. and S.H. performed the literature review. M.G. fabricated the devices and performed all SEM observations. M.S., G.J. and S.H. co-wrote the paper. All authors commented on the manuscript. The authors declare no competing financial interests.
Funding AgencyGrant Number
European Research Council (ERC)616251
Marie Curie FellowshipUNSPECIFIED
Swiss National Science Foundation (SNSF)PP00P2-144695
European Research Council (ERC)PCIG14-GA-2013-631801
Indian Institute of ScienceUNSPECIFIED
Issue or Number:6
PubMed Central ID:PMC4892353
Record Number:CaltechAUTHORS:20160307-081630639
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:65095
Deposited By: Tony Diaz
Deposited On:08 Mar 2016 17:39
Last Modified:06 May 2022 16:51

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