A Caltech Library Service

Proximity-coupled Ti/TiN multilayers for use in kinetic inductance detectors

Vissers, Michael R. and Gao, Jiansong and Sandberg, Martin and Duff, Shannon M. and Wisbey, David S. and Irwin, Kent D. and Pappas, David P. (2013) Proximity-coupled Ti/TiN multilayers for use in kinetic inductance detectors. Applied Physics Letters, 102 (23). Art. No. 232603. ISSN 0003-6951. doi:10.1063/1.4804286.

[img] PDF - Published Version
See Usage Policy.


Use this Persistent URL to link to this item:


We apply the superconducting proximity effect in TiN/Ti multi-layer films to tune the critical temperature, T_C, to within 10 mK with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible T_C’s are obtained from 0.8 to 2.5 K. These films had high resistivities, > 100 µΩ cm, and internal quality factors for resonators in the GHz range, on the order of 100 k and higher. Trilayers of both TiN/Ti/TiN and thicker superlattice films were prepared, demonstrating a well controlled process for films over a wide thickness range. Detectors were fabricated and shown to have single photon resolution at 1550 nm. The high uniformity and controllability coupled with the high quality factor, kinetic inductance, and inertness of TiN make these films ideal for use in frequency multiplexed kinetic inductance detectors and potentially other applications such as nanowire detectors, transition edge sensors, and associated quantum information applications.

Item Type:Article
Related URLs:
URLURL TypeDescription
Additional Information:© 2013 AIP Publishing LLC. (Received 21 September 2012; accepted 23 April 2013; published online 14 June 2013) We acknowledge support for this work from DARPA, the Keck Institute for Space Studies, the NIST Quantum Initiative, and NASA under Contract No. NNH11AR83I. The authors thank Jonas Zmuidzinas, Henry Leduc, and Martin Weides for helpful discussions and insights.
Group:Keck Institute for Space Studies
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Keck Institute for Space Studies (KISS)UNSPECIFIED
National Institute of Standards and Technology (NIST)UNSPECIFIED
Issue or Number:23
Record Number:CaltechAUTHORS:20160307-112135171
Persistent URL:
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:65120
Deposited By: Colette Connor
Deposited On:09 Mar 2016 19:52
Last Modified:10 Nov 2021 23:40

Repository Staff Only: item control page