CaltechAUTHORS
  A Caltech Library Service

Thermoelastic damping in micro- and nanomechanical systems

Lifshitz, Ron and Roukes, M. L. (2000) Thermoelastic damping in micro- and nanomechanical systems. Physical Review B, 61 (8). pp. 5600-5609. ISSN 0163-1829. https://resolver.caltech.edu/CaltechAUTHORS:LIFprb00

[img]
Preview
PDF - Published Version
See Usage Policy.

125Kb

Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:LIFprb00

Abstract

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener’s well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1103/PhysRevB.61.5600DOIUNSPECIFIED
ORCID:
AuthorORCID
Lifshitz, Ron0000-0002-8829-5506
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2000 The American Physical Society Received 20 September 1999 We thank Michael Cross for many helpful conversations. We also thank members of our group, Eyal Buks, Kamil Ekinci, Darrell Harrington, Raj Mohanty, and Keith Schwab, for ongoing discussion and collaboration. We gratefully acknowledge support from DARPA MTO/MEMS under Grant No. DABT63-98-0012.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DABT63-98-0012
Issue or Number:8
Record Number:CaltechAUTHORS:LIFprb00
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:LIFprb00
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:6583
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:13 Dec 2006
Last Modified:09 Mar 2020 13:19

Repository Staff Only: item control page