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Thermoelastic damping in micro- and nanomechanical systems

Lifshitz, Ron and Roukes, M. L. (2000) Thermoelastic damping in micro- and nanomechanical systems. Physical Review B, 61 (8). pp. 5600-5609. ISSN 0163-1829. doi:10.1103/PhysRevB.61.5600.

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The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener’s well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

Item Type:Article
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URLURL TypeDescription
Lifshitz, Ron0000-0002-8829-5506
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2000 The American Physical Society Received 20 September 1999 We thank Michael Cross for many helpful conversations. We also thank members of our group, Eyal Buks, Kamil Ekinci, Darrell Harrington, Raj Mohanty, and Keith Schwab, for ongoing discussion and collaboration. We gratefully acknowledge support from DARPA MTO/MEMS under Grant No. DABT63-98-0012.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DABT63-98-0012
Issue or Number:8
Record Number:CaltechAUTHORS:LIFprb00
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:6583
Deposited By: Archive Administrator
Deposited On:13 Dec 2006
Last Modified:08 Nov 2021 20:35

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