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Diffractive lens fabricated with binary features less than 60 nm

Mait, Joseph N. and Scherer, Axel and Dial, Oliver and Prather, Dennis W. and Gao, Xiang (2000) Diffractive lens fabricated with binary features less than 60 nm. Optics Letters, 25 (6). pp. 381-383. ISSN 0146-9592. http://resolver.caltech.edu/CaltechAUTHORS:MAIol00

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Abstract

We designed, fabricated, and characterized a binary diffractive lens with features less than 60nm. The lens was designed for operation in the red portion of the spectrum. Experimental measurements of lens performance agree with predictions generated by rigorous models of diffraction.


Item Type:Article
Additional Information:© 2000 Optical Society of America. Received October 15, 1999.
Subject Keywords:Diffraction theory; Diffractive optics; Lenses; Lithography; Microstructure fabrication
Record Number:CaltechAUTHORS:MAIol00
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:MAIol00
Alternative URL:http://www.opticsinfobase.org/abstract.cfm?URI=ol-25-6-381
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:6742
Collection:CaltechAUTHORS
Deposited By: Lindsay Cleary
Deposited On:20 Dec 2006
Last Modified:26 Dec 2012 09:24

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