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A water-immersible 2-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications

Huang, Chih-Hsien and Yao, Junjie and Wang, Lihong V. and Zou, Jun (2013) A water-immersible 2-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications. Microsystem Technologies, 19 (4). pp. 577-582. ISSN 0946-7076. https://resolver.caltech.edu/CaltechAUTHORS:20160708-150736109

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Abstract

Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging, whereas the liquid environment required for acoustic propagation limits the usage of traditional microelectromechanical systems (MEMS) scanning mirrors. Here, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. To achieve reliable underwater scanning, flexible polymer torsion hinges fabricated by laser micromachining were used to support the reflective silicon mirror plate. Two efficient electromagnetic microactuators consisting of compact RF choke inductors and high-strength neodymium magnet disc were constructed to drive the silicon mirror plate around a fast axis and a slow axis. The performance of this water-immersible scanning mirror microsystem in both air and water were tested using the laser tracing method. For the fast axis, the resonance frequency reached 224 Hz in air and 164 Hz in water, respectively. The scanning angles in both air and water under ±16 V DC driving were ±12°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±13.6° and ±10°. For the slow axis, the resonance frequency reached 55 Hz in air and 38 Hz in water, respectively. The scanning angles in both air and water under ±10 V DC driving were ±6.5°. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±8.5° and ±6°. The feasibility of using such a water-immersible scanning mirror microsystem for scanning ultrasound microscopic imaging has been demonstrated with a 25-MHz ultrasound pulse/echo system and a target consisting of three optical fibers.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1007/s00542-012-1660-4DOIArticle
https://rdcu.be/6Yd0PublisherFree ReadCube access
http://resolver.caltech.edu/CaltechAUTHORS:20180917-161719842Related ItemConference Paper
ORCID:
AuthorORCID
Wang, Lihong V.0000-0001-9783-4383
Zou, Jun0000-0002-9543-6135
Additional Information:© 2012 Springer-Verlag. Received: 10 July 2012; Accepted: 23 August 2012; Published online: 13 September 2012. This work was supported in part by a grant from the National Institutes of Health (U54-CA136398) and a grant from the National Science Foundation (CMMI-1131758). Lihong Wang has a financial interest in Microphotoacoustics, Inc. and Endra, Inc., which, however, did not support this work.
Funders:
Funding AgencyGrant Number
NIHU54-CA136398
NSFCMMI-1131758
Issue or Number:4
Record Number:CaltechAUTHORS:20160708-150736109
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20160708-150736109
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:68936
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:09 Jul 2016 04:55
Last Modified:09 Mar 2020 13:19

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