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Micromachined silicon acoustic delay lines for ultrasound applications

Chang, Cheng-Chung and Cho, Young and Wang, Lihong and Zou, Jun (2013) Micromachined silicon acoustic delay lines for ultrasound applications. Journal of Micromechanics and Microengineering, 23 (2). Art. No. 25006. ISSN 0960-1317. PMCID PMC4627599. https://resolver.caltech.edu/CaltechAUTHORS:20160803-132546842

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Abstract

In this paper, we present the design, fabrication and testing of novel micromachined silicon-based acoustic delay lines. The acoustic properties of different silicon delay-line structures have been characterized. Based on the experiment results, two different acoustic delay line systems (parallel and serial) have been successfully demonstrated to create controlled time delays in multiple channels of ultrasound signals. The time-delayed ultrasound signals are received with a single-element ultrasound transducer in a time-serial manner. This unique capability could be used to merge multiple signal channels, thereby enabling new ultrasound receiver designs with potentially less complexity and lower cost.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1088/0960-1317/23/2/025006DOIArticle
http://iopscience.iop.org/article/10.1088/0960-1317/23/2/025006/metaPublisherArticle
http://www.ncbi.nlm.nih.gov/pmc/articles/PMC4627599PubMed CentralArticle
ORCID:
AuthorORCID
Wang, Lihong0000-0001-9783-4383
Zou, Jun0000-0002-9543-6135
Additional Information:© 2013 IOP Publishing Ltd. Received 25 July 2012, in final form 15 November 2012; Published 21 December 2012. This work is supported in part through a grant from the National Science Foundation (CMMI-1131758) and National Institutes of Health (U54 CA136398). The authors would like to thank Dr D Voronine and K Wang from the Department of Physics for their kindly assistance on the photoacoustics setup.
Funders:
Funding AgencyGrant Number
NSFCMMI-1131758
NIHU54 CA136398
Issue or Number:2
PubMed Central ID:PMC4627599
Record Number:CaltechAUTHORS:20160803-132546842
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20160803-132546842
Official Citation:Cheng-Chung Chang et al 2013 J. Micromech. Microeng. 23 025006
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:69417
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:03 Aug 2016 23:58
Last Modified:09 Mar 2020 13:19

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