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Evaluation of a Cesium Primary Ion Source on an Ion Microprobe Mass Spectrometer

Williams, Peter and Lewis, R. K. and Evans, Charles A., Jr. and Hanley, P. R. (1977) Evaluation of a Cesium Primary Ion Source on an Ion Microprobe Mass Spectrometer. Analytical Chemistry, 49 (9). pp. 1399-1403. ISSN 0003-2700. doi:10.1021/ac50017a027.

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A commercially available Cs^+ Ion source has been modified for use as the primary Ion source on an Ion microprobe mass spectrometer. The primary ion current Is stable to ~ 1 % over a 1-h period. Up to 1000 h operation Is achieved on a single charge of cesium. Current densities of 10 mA cm^(-2) or better are achieved In microfocused spot sizes ranging from 8 μm to 30 μm. Secondary negative ion yields of electronegative species under Cs^+ Ion bombardment compare favorably with positive ion yields of electropositive species under O_2^+ Ion bombardment. Sputtering rates of Si and GaAs are 2 and 5 times faster respectively than O_2^+ sputtering rates for these substrates. These high sputtering rates facilitate rapid depth profiling analyses. Detection limits have been determined under sample-limited depth profiling conditions for H, C, O, F, and As in Si, and for S In GaAs.

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Additional Information:© 1977 American Chemical Society. RECEIVED for review March 28, 1977. Accepted May 26, 1977. Publication Date: August 1977. Ion implanted samples for this evaluation were kindly provided by D. Wolford, T. Sigmon, J.C. C. Tsai, K. Vaidyanathan, and D. Meyers. We thank R. Blattner for helpful discussion and V. Deline for experimental assistance. This work was supported in part by National Science Foundation Grants DMR-76-01058, CHE-74-05745, and CHE-76-03694, and by General lonex Corporation.
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General lonex CorporationUNSPECIFIED
Issue or Number:9
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Official Citation:Evaluation of a cesium primary ion source on an ion microprobe mass spectrometer Peter Williams, R. K. Lewis, Charles A. Evans Jr., and P. R. Hanley Analytical Chemistry 1977 49 (9), 1399-1403 DOI: 10.1021/ac50017a027
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:69638
Deposited By: Ruth Sustaita
Deposited On:16 Aug 2016 18:05
Last Modified:11 Nov 2021 04:17

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