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Study of Parylene penetration into microchannel

Wang, W. and Kang, D. and Tai, Y. C. (2015) Study of Parylene penetration into microchannel. In: 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE , Piscataway, NJ, pp. 1307-1310. ISBN 978-1-4799-8955-3. https://resolver.caltech.edu/CaltechAUTHORS:20160826-092127903

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Abstract

This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass, substrate temperature and channel size on the penetration length, i.e., the length that Parylene can be deposited into the microchannel from the inlet. Understanding the mechanism of Parylene penetration into microchannel helps to develop mass-producible inner surface protection design and process for microfluidic devices.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181171 DOIArticle
http://ieeexplore.ieee.org/document/7181171/?arnumber=7181171PublisherArticle
ORCID:
AuthorORCID
Tai, Y. C.0000-0001-8529-106X
Additional Information:© 2015 IEEE. The authors thank all the micromachining group members in Caltech. WW thanks the financial support from the scholarship from the China Scholarship Council and the Major State Basic Research Development Program (973 Program) (Grant Nos. 2011CB309502 and 2015CB352100), the National Natural Science Foundation of China (Grant Nos. 81471750 and 91323304), the 985-III program (clinical applications), and the Seeding Grant for Medicine and Information Sciences (2014-MI-04) of Peking University.
Funders:
Funding AgencyGrant Number
China Scholarship CouncilUNSPECIFIED
Major State Basic Research Development Program2011CB309502
Major State Basic Research Development Program2015CB352100
National Natural Science Foundation of China81471750
National Natural Science Foundation of China91323304
Peking UniversityUNSPECIFIED
Subject Keywords:Parylene, penetration, microchannel
Record Number:CaltechAUTHORS:20160826-092127903
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20160826-092127903
Official Citation:W. Wang, D. Kang and Y. C. Tai, "Study of Parylene penetration into microchannel," 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, 2015, pp. 1307-1310. doi: 10.1109/TRANSDUCERS.2015.7181171 URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7181171&isnumber=7180834
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:69957
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:26 Aug 2016 16:35
Last Modified:03 Oct 2019 10:26

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