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Combined use of ion backscattering and x-ray rocking curves in the analyses of superlattices

Hamdi, A. H. and Speriosu, V. S. and Tandon, J. L. and Nicolet, M-A. (1985) Combined use of ion backscattering and x-ray rocking curves in the analyses of superlattices. Physical Review B, 31 (4). pp. 2343-2347. ISSN 0163-1829. doi:10.1103/PhysRevB.31.2343.

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Detailed compositional and structural analyses of superlattices have been carried out by mega-electron-volt He+ backscattering with channeling and with x-ray rocking curves. Through the combined use of the two techniques, depth profiles of strain, composition, and crystalline quality have been determined. An example of an AlxGa1-xAs/GaAs strained-layer-superlattice (SLS) is considered. The thicknesses of the individual periods in these SLS structures were accurately measured by backscattering spectrometry. The values so obtained were used in the detailed calculations of x-ray rocking curves. Excellent agreement between measured and calculated curves was achieved. Transition regions at the interfaces of the various layers in the SLS were also detected and measured by both techniques. The two techniques complement each other and together provide powerful quantitative tools to characterize SLS structures.

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Additional Information:©1985 The American Physical Society Received 17 September 1984 We would like to thank Y.C.M. Yeh, D.A. Smith, A. Mehta, and J. Wendt at Applied Solar Energy Corporation (ASEC) for the growth of SLS structures. Encouragement provided by K.S. Ling and P.A. Iles at ASEC is appreciated. A.H. Hamdi extends his thanks to IBM for financial support. The work was supported by the Defense Advanced Research Projects Agency under Contract No. MDA 903-82-C-0348 at Caltech.
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Deposited On:08 Jan 2007
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