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Iron Silicide Root Formation in Carbon Nanotubes Grown by Microwave PECVD

AuBuchon, Joseph F. and Daraio, Chiara and Chen, Li-Han and Gapin, Andrew I. and Jin, Sungho (2005) Iron Silicide Root Formation in Carbon Nanotubes Grown by Microwave PECVD. Journal of Physical Chemistry B, 109 (51). pp. 24215-24219. ISSN 1520-6106. doi:10.1021/jp0558627.

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Aligned carbon nanotubes have been grown using microwave plasma enhanced chemical vapor deposition (PECVD). The carbon nanotubes are nucleated from iron catalyst particles which, during growth, remain adherent to the silicon substrates. By analysis with high-resolution electron microscopy, we observe iron silicide roots penetrating into the silicon substrate at the interface of the catalyst particles and the substrate, thus providing strong adhesion of the carbon nanotubes onto the substrate. The iron silicide roots assist in the attachment of the catalyst particles to the substrate and play a role in the evolution of the catalyst particle morphology and resulting base growth mode. Carbon nanotubes grown by microwave PECVD could exhibit superior electrical and thermal transport properties over other PECVD processes, so an understanding of the growth mechanism is important for utilization in device applications.

Item Type:Article
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Daraio, Chiara0000-0001-5296-4440
Additional Information:© 2005 American Chemical Society. Received: October 13, 2005; In Final Form: November 15, 2005. Publication Date (Web): December 1, 2005. We acknowledge support of the work by NSF NIRTs under grant numbers DMI-0210559 and DMI-0303790, and University of California Discovery Fund under Grant No. ele02-10133/Jin. We thank Dr. E. A. Stack for assistance with TEM analysis and the National Center for Electron Microscopy, Lawrence Berkeley Lab, which is supported by the U.S. Department of Energy under Contract # DE-AC02-05CH11231.
Funding AgencyGrant Number
University of Californiaele02-10133/Jin
Department of Energy (DOE)DE-AC02-05CH11231
Issue or Number:51
Record Number:CaltechAUTHORS:20161004-104532821
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Official Citation:Iron Silicide Root Formation in Carbon Nanotubes Grown by Microwave PECVD Joseph F. AuBuchon, Chiara Daraio, Li-Han Chen, Andrew I. Gapin, and Sungho Jin The Journal of Physical Chemistry B 2005 109 (51), 24215-24219 DOI: 10.1021/jp0558627
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:70813
Deposited By: Tony Diaz
Deposited On:04 Oct 2016 17:53
Last Modified:11 Nov 2021 04:35

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