Gopal, Vidyut and Radmilovic, Velimir R. and Daraio, Chiara and Jin, Sungho and Yang, Peidong and Stach, Eric A. (2004) Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography. Nano Letters, 4 (11). pp. 2059-2063. ISSN 1530-6984. doi:10.1021/nl0492133. https://resolver.caltech.edu/CaltechAUTHORS:20161004-133008627
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Abstract
Rapid prototyping of bottom-up nanostructure circuits is demonstrated, utilizing metal deposition and patterning methodology based on combined focused ion and electron beam induced decomposition of a metal−organic precursor gas. Ohmic contacts were fabricated using electron beam deposition, followed by the faster process of ion beam deposition for interconnect formation. Two applications of this method are demonstrated: three-terminal transport measurements of Y-junction carbon nanotubes and fabrication of nanocircuits for determination of electromechanical degradation of silver nanowires.
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| Additional Information: | © 2004 American Chemical Society. Received May 25, 2004; Revised Manuscript Received September 6, 2004. Publication Date (Web): October 15, 2004. This work was supported by the Office of Science, Basic Energy Sciences, Division of Materials Sciences of the U.S. Department of Energy under Contract No. DE-AC03-76SF00098. We thank Prof. Apparao M. Rao of Clemson University for Y-junction nanotube synthesis. We thank Andrea Tao of the University of California, Berkeley for Ag nanowire synthesis. | |||||||||
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| Issue or Number: | 11 | |||||||||
| DOI: | 10.1021/nl0492133 | |||||||||
| Record Number: | CaltechAUTHORS:20161004-133008627 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20161004-133008627 | |||||||||
| Official Citation: | Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography Vidyut Gopal, Velimir R. Radmilovic, Chiara Daraio, Sungho Jin, Peidong Yang, and Eric A. Stach Nano Letters 2004 4 (11), 2059-2063 DOI: 10.1021/nl0492133 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 70831 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Tony Diaz | |||||||||
| Deposited On: | 04 Oct 2016 20:39 | |||||||||
| Last Modified: | 11 Nov 2021 04:36 |
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