CaltechAUTHORS
  A Caltech Library Service

Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography

Gopal, Vidyut and Radmilovic, Velimir R. and Daraio, Chiara and Jin, Sungho and Yang, Peidong and Stach, Eric A. (2004) Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography. Nano Letters, 4 (11). pp. 2059-2063. ISSN 1530-6984. https://resolver.caltech.edu/CaltechAUTHORS:20161004-133008627

Full text is not posted in this repository. Consult Related URLs below.

Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:20161004-133008627

Abstract

Rapid prototyping of bottom-up nanostructure circuits is demonstrated, utilizing metal deposition and patterning methodology based on combined focused ion and electron beam induced decomposition of a metal−organic precursor gas. Ohmic contacts were fabricated using electron beam deposition, followed by the faster process of ion beam deposition for interconnect formation. Two applications of this method are demonstrated:  three-terminal transport measurements of Y-junction carbon nanotubes and fabrication of nanocircuits for determination of electromechanical degradation of silver nanowires.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl0492133DOIArticle
http://pubs.acs.org/doi/abs/10.1021/nl0492133PublisherArticle
ORCID:
AuthorORCID
Daraio, Chiara0000-0001-5296-4440
Yang, Peidong0000-0003-4799-1684
Additional Information:© 2004 American Chemical Society. Received May 25, 2004; Revised Manuscript Received September 6, 2004. Publication Date (Web): October 15, 2004. This work was supported by the Office of Science, Basic Energy Sciences, Division of Materials Sciences of the U.S. Department of Energy under Contract No. DE-AC03-76SF00098. We thank Prof. Apparao M. Rao of Clemson University for Y-junction nanotube synthesis. We thank Andrea Tao of the University of California, Berkeley for Ag nanowire synthesis.
Funders:
Funding AgencyGrant Number
Department of Energy (DOE)DE-AC03-76SF00098
Issue or Number:11
Record Number:CaltechAUTHORS:20161004-133008627
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20161004-133008627
Official Citation:Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography Vidyut Gopal, Velimir R. Radmilovic, Chiara Daraio, Sungho Jin, Peidong Yang, and Eric A. Stach Nano Letters 2004 4 (11), 2059-2063 DOI: 10.1021/nl0492133
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:70831
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:04 Oct 2016 20:39
Last Modified:09 Mar 2020 13:19

Repository Staff Only: item control page