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Micromachined electromagnetic scanning mirrors

Miller, Raanan A. and Tai, Yu-Chong (1997) Micromachined electromagnetic scanning mirrors. Optical Engineering, 36 (5). pp. 1399-1407. ISSN 0091-3286. doi:10.1117/1.601348.

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We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved.

Item Type:Article
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URLURL TypeDescription
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1997 Society of Photo-Optical Instrumentation Engineers. Received Nov. 8, 1996; Revised Jan. 14, 1997; Accepted Jan. 24, 1997. This project was partially supported by AFOSR and DARPA under AFOSR Grant No. F49620-94-1-0008. The authors would like to thank Geoffrey Burr, Gregory Billock, and Dr. Demetri Psaltis for using the MEMS mirrors in their holographic storage systems. Without their help this work would not be possible. We also thank Gordon Hughes of Seagate technology, and Stanley Bacon for their assistance with magnetic measurements.
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)F49620-94-1-0008
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Subject Keywords:terms: micro-opto-electro-mechanical systems; electromagnetic actuation; laser scanning mirror; holographic data storage; permalloy
Issue or Number:5
Record Number:CaltechAUTHORS:20161006-135453747
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Official Citation:Raanan A. Miller and Yu-Chong Tai "Micromachined electromagnetic scanning mirrors", Opt. Eng. 36(5), 1399-1407 (May 01, 1997). ;
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:70926
Deposited By: Ruth Sustaita
Deposited On:12 Oct 2016 23:15
Last Modified:11 Nov 2021 04:37

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