Hamden, Erika T. and Jewell, April D. and Shapiro, Charles A. and Cheng, Samuel R. and Goodsall, Tim M. and Hennessy, John and Hoenk, Michael and Jones, Todd and Gordon, Sam and Ong, Hwei Ru and Schiminovich, David and Martin, D. Christopher and Nikzad, Shouleh (2016) Charge-coupled devices detectors with high quantum efficiency at UV wavelengths. Journal of Astronomical Telescopes, Instruments, and Systems, 2 (3). Art. No. 036003. ISSN 2329-4124. doi:10.1117/1.JATIS.2.3.036003. https://resolver.caltech.edu/CaltechAUTHORS:20161007-152230649
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Abstract
We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of single-layer coatings, which achieve >50% quantum efficiency (QE) in four bands from 130 to 300 nm. We now present multilayer coating designs that significantly outperform our previous work between 195 and 215 nm. Using up to 11 layers, we present several model designs to reach QE above 80%. We also demonstrate the successful performance of 5 and 11 layer ARCs on silicon and fused silica substrates. Finally, we present a five-layer coating deposited onto a thinned, delta-doped CCD and demonstrate external QE greater than 60% between 202 and 208 nm, with a peak of 67.6% at 206 nm.
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| Additional Information: | © 2016 The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Received January 19, 2016; Accepted August 22, 2016. The authors wish to thank the reviewers for their detailed, helpful comments and suggestions. In addition, we wish to thank Frank Greer, Michael Lee, and Layton Baker, all of JPL, for their assistance with ALD processes, and Leslie Wulff for helpful discussions. The research was carried out in part at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with NASA. This work was partially supported by KISS, the W. M. Keck Institute for Space Studies, and by NASA Headquarters under the NASA Earth and Space Science Fellowship Program, NASA Grant NNX11AO07H, and NASA Grant NNX12AF29G. E. T. H. is supported by an NSF Astronomy and Astrophysics Postdoctoral Fellowship under award AST-1402206. | ||||||||||||||
| Group: | Keck Institute for Space Studies, Space Astrophysics Laboratory | ||||||||||||||
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| Subject Keywords: | UV; antireflection coatings; thin-films; charge-coupled devices | ||||||||||||||
| Issue or Number: | 3 | ||||||||||||||
| DOI: | 10.1117/1.JATIS.2.3.036003 | ||||||||||||||
| Record Number: | CaltechAUTHORS:20161007-152230649 | ||||||||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20161007-152230649 | ||||||||||||||
| Official Citation: | Erika T. Hamden ; April D. Jewell ; Charles A. Shapiro ; Samuel R. Cheng ; Tim M. Goodsall, et al. "Charge-coupled devices detectors with high quantum efficiency at UV wavelengths", J. Astron. Telesc. Instrum. Syst. 2(3), 036003 (Sep 12, 2016). ; http://dx.doi.org/10.1117/1.JATIS.2.3.036003 | ||||||||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||||||||
| ID Code: | 70959 | ||||||||||||||
| Collection: | CaltechAUTHORS | ||||||||||||||
| Deposited By: | Ruth Sustaita | ||||||||||||||
| Deposited On: | 12 Oct 2016 20:00 | ||||||||||||||
| Last Modified: | 11 Nov 2021 04:37 |
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