Buks, Eyal and Roukes, Michael L. (2002) Electrically tunable collective response in a coupled micromechanical array. Journal of Microelectromechanical Systems, 11 (6). pp. 802-807. ISSN 1057-7157. doi:10.1109/JMEMS.2002.805056. https://resolver.caltech.edu/CaltechAUTHORS:BUKjmems02
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Abstract
We employ optical diffraction to study the mechanical properties of a grating array of suspended doubly clamped beams made of Au. The device allows application of electrostatic coupling between the beams that gives rise to formation of a band of normal modes of vibration (phonons). We parametrically excite these collective modes and study the response by measuring the diffraction signal. The results indicate that nonlinear effects strongly affect the dynamics of the system. Further optimization will allow employing similar systems for real-time mechanical spectrum analysis of electrical waveforms.
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| Additional Information: | © 2002 IEEE. Reprinted with permission. Manuscript received September 17, 2001; revised February 5, 2002. [Posted online: 2002-12-16] This work was supported by DARPA MTO/MEMS under Grant DABT63-98-1-0012. The work of E. Buks was supported by the Rothschild fellowship and the R. A. Millikan postdoctoral fellowship at Caltech. Subject Editor R. T. Howe. The authors are grateful to K. Schwab for his assistance in sample fabrication and to R. Lifshitz for correcting an algebraic error in the manuscript. They also thank R. Lifshitz and M. Cross for helpful discussions. | ||||||||
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| Subject Keywords: | Grating, MEMS, nonlinear, parametric resonance | ||||||||
| Issue or Number: | 6 | ||||||||
| DOI: | 10.1109/JMEMS.2002.805056 | ||||||||
| Record Number: | CaltechAUTHORS:BUKjmems02 | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:BUKjmems02 | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 7193 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | Archive Administrator | ||||||||
| Deposited On: | 16 Jan 2007 | ||||||||
| Last Modified: | 08 Nov 2021 20:40 |
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