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Comparative study of the viscoelasticity of parylene thin films for MEMS using Nano-DMA and Molecular Dynamics

Sui, Wenshu and Duvieusart, Maxime S. and Zhao, Junhua and Tai, Yu-Chong and Lee, Yi-Kuen (2017) Comparative study of the viscoelasticity of parylene thin films for MEMS using Nano-DMA and Molecular Dynamics. In: IEEE 30th International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 468-471. ISBN 978-1-5090-5078-9. http://resolver.caltech.edu/CaltechAUTHORS:20170302-132639514

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Abstract

We present a comparative study of the viscoelasticity of parylene C (PPXC) by using Nano-DMA (Dynamical Mechanical Analysis) and Molecular Dynamics (MD) simulations. By applying sinusoidal loading on PPXC films at different temperatures and frequencies, the complex modulus and glass transition temperature (Tg) of the PPXC were obtained. The predicted Tg determined from the temperature-dependent density change in the MD model is consistent with the results in our measurements and previous works. Furthermore, with Time-Temperature Superposition Principle (TTSP), we successfully determined the master curve of PPXC, for the first time, which is critical for the parylene reliability study of bio-MEMS devices.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/MEMSYS.2017.7863444 DOIArticle
http://ieeexplore.ieee.org/document/7863444/PublisherArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2017 IEEE. This work was sponsored by a research grant of HKUST (Ref No. FP007).
Funders:
Funding AgencyGrant Number
Hong Kong University of Science and TechnologyFP007
Record Number:CaltechAUTHORS:20170302-132639514
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20170302-132639514
Official Citation:W. Sui, M. S. Duvieusart, J. Zhao, Y. C. Tai and Y. K. Lee, "Comparative study of the viscoelasticity of parylene thin films for MEMS using Nano-DMA and Molecular Dynamics," 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, 2017, pp. 468-471. URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7863444&isnumber=7863316
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:74670
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:03 Mar 2017 03:24
Last Modified:03 Mar 2017 03:24

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