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MEMS electrolytic inchworms for movable neural probe applications

Giacchino, L. and Tai, Y. C. (2011) MEMS electrolytic inchworms for movable neural probe applications. In: IEEE 24th International Conference on Micro Electro Mechanical Systems. IEEE , Piscataway, NJ, pp. 1253-1256. ISBN 978-1-4244-9634-1.

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We have designed, fabricated, and tested an inchworm actuator using water electrolysis as the mechanical power source. The device was introduced in [1], and further characterization and interesting reliability results are reported here. Each actuator is made of two sealed electrolyte-filled silicone balloons. When electrolysis is run inside a balloon, the balloon expands due to gas generation. When electrolysis is stopped, the balloon shrinks due to gas recombination and permeation through the silicone. Bidirectional movement of a rotor, e.g., a metal probe, is obtained by applying specific expansion/shrinkage sequences to the balloons. The device works at low voltage and current, with peak power consumption around 100 μW. Displacement of silicon and metal probes from 0.5 μm to 75 μm per cycle was demonstrated. Reliability tests were also performed. The hydrogel-enabled process to fabricate the balloons is also illustrated.

Item Type:Book Section
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URLURL TypeDescription 10.1109/MEMSYS.2011.5734660DOIArticle
Tai, Y. C.0000-0001-8529-106X
Additional Information:© 2011 IEEE. The funding of the work is provided by NIH, under Award Number R01 EY015545.
Funding AgencyGrant Number
NIHR01 EY015545
Record Number:CaltechAUTHORS:20170306-155542040
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Official Citation:L. Giacchino and Y. C. Tai, "MEMS electrolytic inchworms for movable neural probe applications," 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, Cancun, 2011, pp. 1253-1256. doi: 10.1109/MEMSYS.2011.5734660
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:74815
Deposited By: Kristin Buxton
Deposited On:07 Mar 2017 16:08
Last Modified:03 Oct 2019 16:43

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