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Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators

Bargatin, I. and Kozinsky, I. and Roukes, M. L. (2007) Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators. Applied Physics Letters, 90 (9). Art. No. 093116. ISSN 0003-6951. https://resolver.caltech.edu/CaltechAUTHORS:BARapl07

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Abstract

The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1063/1.2709620DOIUNSPECIFIED
ORCID:
AuthorORCID
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2007 American Institute of Physics. (Received 27 November 2006; accepted 22 January 2007; published online 28 February 2007) This work was supported by DARPA/MTO through MGA Grant No. NBCH1050001. The authors thank C.A. Zorman and M. Mehregany for providing them with the silicon carbide wafers. The authors also thank B. Gudlewski for helping them with e-beam writing.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)NBCH1050001
Subject Keywords:silicon compounds; wide band gap semiconductors; micromechanical resonators; nanotechnology; vibrational modes; thermoelasticity
Issue or Number:9
Record Number:CaltechAUTHORS:BARapl07
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:BARapl07
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:7531
Collection:CaltechAUTHORS
Deposited By: Archive Administrator
Deposited On:01 Mar 2007
Last Modified:02 Oct 2019 23:43

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