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Fabrication of Free-Standing Nanoscale Alumina Membranes with Controllable Pore Aspect Ratios

Toh, Chee-Seng and Kayes, Brendan M. and Nemanick, E. Joseph and Lewis, Nathan S. (2004) Fabrication of Free-Standing Nanoscale Alumina Membranes with Controllable Pore Aspect Ratios. Nano Letters, 4 (5). pp. 767-770. ISSN 1530-6984. doi:10.1021/nl0348286. https://resolver.caltech.edu/CaltechAUTHORS:20170408-162241423

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Abstract

Porous alumina films with controllable pore sizes and having submicrometer film thicknesses were fabricated by the anodization of Al overlayers. The Al was deposited by sputtering onto either glass or onto silicon that had been coated with a layer of silicon nitride. Alumina membranes having thicknesses between 300 and 1000 nm were prepared analogously using a lithographic process to produce free-standing porous alumina films that were peripherally supported on a 500-μm-thick silicon substrate.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl0348286DOIArticle
ORCID:
AuthorORCID
Kayes, Brendan M.0000-0002-4697-1713
Nemanick, E. Joseph0000-0002-4650-6491
Lewis, Nathan S.0000-0001-5245-0538
Additional Information:© 2004 American Chemical Society. Received September 25, 2003; Revised Manuscript Received March 22, 2004. Publication Date (Web): April 23, 2004. We acknowledge the National Science Foundation (grant CHE-0213589) for supporting this work and the National University of Singapore for providing a fellowship to C.S.T. We also thank J. Casperson for assistance with the ion-milling process.
Funders:
Funding AgencyGrant Number
NSFCHE-0213589
National University of SingaporeUNSPECIFIED
Issue or Number:5
DOI:10.1021/nl0348286
Record Number:CaltechAUTHORS:20170408-162241423
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170408-162241423
Official Citation:Fabrication of Free-Standing Nanoscale Alumina Membranes with Controllable Pore Aspect Ratios Chee-Seng Toh, Brendan M. Kayes, E. Joseph Nemanick, and, and Nathan S. Lewis Nano Letters 2004 4 (5), 767-770 DOI: 10.1021/nl0348286
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:76171
Collection:CaltechAUTHORS
Deposited By: 1Science Import
Deposited On:26 Jul 2017 23:14
Last Modified:15 Nov 2021 16:58

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