Toh, Chee-Seng and Kayes, Brendan M. and Nemanick, E. Joseph and Lewis, Nathan S. (2004) Fabrication of Free-Standing Nanoscale Alumina Membranes with Controllable Pore Aspect Ratios. Nano Letters, 4 (5). pp. 767-770. ISSN 1530-6984. doi:10.1021/nl0348286. https://resolver.caltech.edu/CaltechAUTHORS:20170408-162241423
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Abstract
Porous alumina films with controllable pore sizes and having submicrometer film thicknesses were fabricated by the anodization of Al overlayers. The Al was deposited by sputtering onto either glass or onto silicon that had been coated with a layer of silicon nitride. Alumina membranes having thicknesses between 300 and 1000 nm were prepared analogously using a lithographic process to produce free-standing porous alumina films that were peripherally supported on a 500-μm-thick silicon substrate.
| Item Type: | Article | ||||||||
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| Additional Information: | © 2004 American Chemical Society. Received September 25, 2003; Revised Manuscript Received March 22, 2004. Publication Date (Web): April 23, 2004. We acknowledge the National Science Foundation (grant CHE-0213589) for supporting this work and the National University of Singapore for providing a fellowship to C.S.T. We also thank J. Casperson for assistance with the ion-milling process. | ||||||||
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| Issue or Number: | 5 | ||||||||
| DOI: | 10.1021/nl0348286 | ||||||||
| Record Number: | CaltechAUTHORS:20170408-162241423 | ||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20170408-162241423 | ||||||||
| Official Citation: | Fabrication of Free-Standing Nanoscale Alumina Membranes with Controllable Pore Aspect Ratios Chee-Seng Toh, Brendan M. Kayes, E. Joseph Nemanick, and, and Nathan S. Lewis Nano Letters 2004 4 (5), 767-770 DOI: 10.1021/nl0348286 | ||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||||
| ID Code: | 76171 | ||||||||
| Collection: | CaltechAUTHORS | ||||||||
| Deposited By: | 1Science Import | ||||||||
| Deposited On: | 26 Jul 2017 23:14 | ||||||||
| Last Modified: | 15 Nov 2021 16:58 |
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