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Visible Wavelength Color Filters using Dielectric Subwavelength Gratings for Backside-illuminated CMOS Image Sensor Technologies

Horie, Yu and Han, Seunghoon and Lee, Jeong-Yub and Kim, Jaekwan and Kim, Yongsung and Arbabi, Amir and Shin, Changgyun and Shi, Lilong and Arbabi, Ehsan and Kamali, Seyedeh Mahsa and Lee, Hong-Seok and Hwang, Sungwoo and Faraon, Andrei (2017) Visible Wavelength Color Filters using Dielectric Subwavelength Gratings for Backside-illuminated CMOS Image Sensor Technologies. Nano Letters, 17 (5). pp. 3159-3164. ISSN 1530-6984. http://resolver.caltech.edu/CaltechAUTHORS:20170410-104830367

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Abstract

We report transmissive color filters based on subwavelength dielectric gratings that can replace conventional dye-based color filters used in backside-illuminated CMOS image sensor (BSI CIS) technologies. The filters are patterned in an 80-nm-thick poly-silicon film on a 115-nm-thick SiO_2 spacer layer. They are optimized for operating at the primary RGB colors, exhibit peak transmittance of 60-80%, and an almost insensitive response over a ±20° angular range. This technology enables shrinking of the pixel sizes down to near a micrometer.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/acs.nanolett.7b00636DOIArticle
http://pubs.acs.org/doi/abs/10.1021/acs.nanolett.7b00636PublisherArticle
http://pubs.acs.org/doi/suppl/10.1021/acs.nanolett.7b00636PublisherSupporting Information
ORCID:
AuthorORCID
Horie, Yu0000-0001-7083-1270
Arbabi, Amir0000-0001-8831-7552
Arbabi, Ehsan0000-0002-5328-3863
Faraon, Andrei0000-0002-8141-391X
Additional Information:© 2017 American Chemical Society. Received: February 14, 2017; Revised: March 30, 2017; Published: April 7, 2017. This work was supported by Samsung Electronics. Part of the device nanofabrication was developed at the Kavli Nanoscience Institute at California Institute of Technology. Y. H. was supported by a Japan Student Services Organization (JASSO) fellowship. S. M. K. was supported by the DOE Light-Material Interactions in Energy Conversion Energy Frontier Research Center funded by the US Department of Energy, Office of Science, Office of Basic Energy Sciences under Award no. DE-SC0001293. We thank H. A. Atwater and B. Fultz for providing the transmission-type microscope and the spectrometer. The authors declare no competing financial interest.
Group:Kavli Nanoscience Institute
Funders:
Funding AgencyGrant Number
Samsung ElectronicsUNSPECIFIED
Japan Student Services Organization (JASSO)UNSPECIFIED
Department of Energy (DOE)DE-SC0001293
Subject Keywords:Subwavelength grating, high-index contrast, color filters, CMOS image sensor
Record Number:CaltechAUTHORS:20170410-104830367
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20170410-104830367
Official Citation:Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies Yu Horie, Seunghoon Han, Jeong-Yub Lee, Jaekwan Kim, Yongsung Kim, Amir Arbabi, Changgyun Shin, Lilong Shi, Ehsan Arbabi, Seyedeh Mahsa Kamali, Hong-Seok Lee, Sungwoo Hwang, and Andrei Faraon Nano Letters 2017 17 (5), 3159-3164 DOI: 10.1021/acs.nanolett.7b00636
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:76470
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:10 Apr 2017 17:57
Last Modified:03 Jul 2018 16:45

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