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Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators

Feng, X. L. and He, R. R. and Yang, P. D. and Roukes, M. L. (2007) Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators. In: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE , Piscataway, NJ, pp. 1325-1326. ISBN 1-4244-0841-5. https://resolver.caltech.edu/CaltechAUTHORS:20170426-161229809

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Abstract

We report measurements on quality factors (Q's) of single-crystal silicon nanowire (SiNW) resonators operating in the very-high frequency (VHF) range. Q's of ~200 MHz metalized SiNWs are considerably lower than those of the pristine SiNWs operating at similar frequencies. The observed damping effect due to resonance transduction agrees well with the loaded-Q model for magnetomotive scheme. The temperature dependency of dissipation (Q^(-1)) is found to be approximately from Q^(-1) ∝ T^(0.3) to Q^(-1) ∝ T^(0.4). Clamping losses are becoming important for such VHF ultrasmall resonators.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/SENSOR.2007.4300384DOIArticle
http://ieeexplore.ieee.org/document/4300384/PublisherArticle
ORCID:
AuthorORCID
Yang, P. D.0000-0003-4799-1684
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2007 IEEE.
Subject Keywords:Nanoelectromechanical System, Nanowire, Resonator, Quality Factor (Q), Dissipation
Record Number:CaltechAUTHORS:20170426-161229809
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170426-161229809
Official Citation:X. L. Feng, R. R. He, P. D. Yang and M. L. Roukes, "Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, 2007, pp. 1325-1326. doi: 10.1109/SENSOR.2007.4300384
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:76968
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:26 Apr 2017 23:38
Last Modified:09 Mar 2020 13:19

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