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Phase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical Resonators

Feng, X. L. and He, R. R. and Yang, P. D. and Roukes, M. L. (2007) Phase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical Resonators. In: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE , Piscataway, NJ, pp. 327-330. ISBN 1-4244-0841-5. https://resolver.caltech.edu/CaltechAUTHORS:20170426-163906737

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Abstract

We report measurements and analyses of noise characteristics of very-high frequency (VHF) silicon nanowire (SiNW) nanoelectromechanical systems (NEMS). VHF SiNW resonators vibrating at ~200MHz typically have displacement sensitivity of ~5fm/(Hz^(1/2)) and force sensitivity of 50~250aN/(Hz^(1/2)) set by thermomechanical fluctuations. They have ~1nm critical amplitude and intrinsic dynamic range of 90~110 dB. Amplifier noise and resistor thermal noise dominate the resonance detection, resulting in in compromised displacement noise floor (typically ≥30 fm/(Hz^(1/2))), dynamic range (reduced to 70~90 dB), and phase noise (≥20~30dB degradation). We develop SiNW-NEMS-based phase-locking techniques to investigate the phase noise and frequency stability performance. Frequency stability of ~0.1ppm and resonant mass sensitivity of ~10 zg (1 zg=10^(-21)g) have been achieved.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/SENSOR.2007.4300134DOIArticle
http://ieeexplore.ieee.org/document/4300134/PublisherArticle
ORCID:
AuthorORCID
Yang, P. D.0000-0003-4799-1684
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2007 IEEE.
Subject Keywords:Nanoelectromechanical System, Nanowire, Resonator, Phase Noise, Frequency Stability
Record Number:CaltechAUTHORS:20170426-163906737
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170426-163906737
Official Citation:X. L. Feng, R. R. He, P. D. Yang and M. L. Roukes, "Phase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical Resonators," TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Lyon, 2007, pp. 327-330. doi: 10.1109/SENSOR.2007.4300134
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:76969
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:27 Apr 2017 01:55
Last Modified:09 Mar 2020 13:19

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