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Al transmon qubits on silicon-on-insulator for quantum device integration

Keller, Andrew J. and Dieterle, Paul B. and Fang, Michael and Berger, Brett and Fink, Johannes M. and Painter, Oskar (2017) Al transmon qubits on silicon-on-insulator for quantum device integration. Applied Physics Letters, 111 (4). Art. No. 042603. ISSN 0003-6951. doi:10.1063/1.4994661.

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We present the fabrication and characterization of an aluminum transmon qubit on a silicon-on-insulator substrate. Key to the qubit fabrication is the use of an anhydrous hydrofluoric vapor process which selectively removes the lossy silicon oxide buried underneath the silicon device layer. For a 5.6 GHz qubit measured dispersively by a 7.1 GHz resonator, we find T_1 = 3.5 μs and T_2* = 2.2 μs. This process in principle permits the co-fabrication of silicon photonic and mechanical elements, providing a route towards chip-scale integration of electro-opto-mechanical transducers for quantum networking of superconducting microwave quantum circuits. The additional processing steps are compatible with established fabrication techniques for aluminum transmon qubits on silicon.

Item Type:Article
Related URLs:
URLURL TypeDescription Paper
Keller, Andrew J.0000-0003-3030-1149
Fink, Johannes M.0000-0001-8112-028X
Painter, Oskar0000-0002-1581-9209
Alternate Title:Superconducting qubits on silicon substrates for quantum device integration
Additional Information:© 2017 Published by AIP Publishing. Received 3 April 2017; accepted 5 July 2017; published online 25 July 2017. We gratefully acknowledge the Martinis Group (UCSB/Google) for their amplifier and filter designs, Dan Vestyck for his support of our uEtch HF vapor tool, and Mark Rosamond for discussions. This work was supported by the AFOSR MURI Quantum Photonic Matter (Grant No. 16RT0696), the AFOSR MURI Wiring Quantum Networks with Mechanical Transducers (Grant No. FA9550-15-1-0015), the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center (Grant No. PHY-1125565) with the support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. A.J.K. acknowledges the IQIM Postdoctoral Fellowship.
Group:Institute for Quantum Information and Matter, Kavli Nanoscience Institute
Funding AgencyGrant Number
Air Force Office of Scientific Research (AFOSR)16RT0696
Air Force Office of Scientific Research (AFOSR)FA9550-15-1-0015
Institute for Quantum Information and Matter (IQIM)UNSPECIFIED
Gordon and Betty Moore FoundationUNSPECIFIED
Kavli Nanoscience InstituteUNSPECIFIED
Issue or Number:4
Record Number:CaltechAUTHORS:20170427-153536925
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Official Citation:Al transmon qubits on silicon-on-insulator for quantum device integration. Andrew J. Keller, Paul B. Dieterle, Michael Fang, Brett Berger, Johannes M. Fink, and Oskar Painter. Applied Physics Letters 2017 111:4
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:77027
Deposited By: Joy Painter
Deposited On:27 Apr 2017 22:42
Last Modified:15 Nov 2021 17:04

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