Al transmon qubits on silicon-on-insulator for quantum device integration

Keller, Andrew J. and Dieterle, Paul B. and Fang, Michael and Berger, Brett and Fink, Johannes M. and Painter, Oskar (2017) Al transmon qubits on silicon-on-insulator for quantum device integration. Applied Physics Letters, 111 (4). Art. No. 042603. ISSN 0003-6951. doi:10.1063/1.4994661. https://resolver.caltech.edu/CaltechAUTHORS:20170427-153536925

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Abstract

We present the fabrication and characterization of an aluminum transmon qubit on a silicon-on-insulator substrate. Key to the qubit fabrication is the use of an anhydrous hydrofluoric vapor process which selectively removes the lossy silicon oxide buried underneath the silicon device layer. For a 5.6 GHz qubit measured dispersively by a 7.1 GHz resonator, we find T_1 = 3.5 μs and T_2* = 2.2 μs. This process in principle permits the co-fabrication of silicon photonic and mechanical elements, providing a route towards chip-scale integration of electro-opto-mechanical transducers for quantum networking of superconducting microwave quantum circuits. The additional processing steps are compatible with established fabrication techniques for aluminum transmon qubits on silicon.

Item Type:

Article

Related URLs:

URL	URL Type	Description
http://dx.doi.org/10.1063/1.4994661	DOI	Article
http://aip.scitation.org/doi/10.1063/1.4994661	Publisher	Article
http://arxiv.org/abs/1703.10195	arXiv	Discussion Paper

ORCID:

Author	ORCID
Keller, Andrew J.	0000-0003-3030-1149
Fink, Johannes M.	0000-0001-8112-028X
Painter, Oskar	0000-0002-1581-9209

Alternate Title:

Superconducting qubits on silicon substrates for quantum device integration

Additional Information:

© 2017 Published by AIP Publishing. Received 3 April 2017; accepted 5 July 2017; published online 25 July 2017. We gratefully acknowledge the Martinis Group (UCSB/Google) for their amplifier and filter designs, Dan Vestyck for his support of our uEtch HF vapor tool, and Mark Rosamond for discussions. This work was supported by the AFOSR MURI Quantum Photonic Matter (Grant No. 16RT0696), the AFOSR MURI Wiring Quantum Networks with Mechanical Transducers (Grant No. FA9550-15-1-0015), the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center (Grant No. PHY-1125565) with the support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. A.J.K. acknowledges the IQIM Postdoctoral Fellowship.

Group:

Institute for Quantum Information and Matter, Kavli Nanoscience Institute

Funders:

Funding Agency	Grant Number
Air Force Office of Scientific Research (AFOSR)	16RT0696
Air Force Office of Scientific Research (AFOSR)	FA9550-15-1-0015
Institute for Quantum Information and Matter (IQIM)	UNSPECIFIED
NSF	PHY-1125565
Gordon and Betty Moore Foundation	UNSPECIFIED
Kavli Nanoscience Institute	UNSPECIFIED

Issue or Number:

DOI:

10.1063/1.4994661

Record Number:

CaltechAUTHORS:20170427-153536925

Persistent URL:

https://resolver.caltech.edu/CaltechAUTHORS:20170427-153536925

Official Citation:

Al transmon qubits on silicon-on-insulator for quantum device integration. Andrew J. Keller, Paul B. Dieterle, Michael Fang, Brett Berger, Johannes M. Fink, and Oskar Painter. Applied Physics Letters 2017 111:4

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No commercial reproduction, distribution, display or performance rights in this work are provided.

ID Code:

77027

Collection:

CaltechAUTHORS

Deposited By:

Joy Painter

Deposited On:

27 Apr 2017 22:42

Last Modified:

15 Nov 2021 17:04

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