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Integrated surface-micromachined mass flow controller

Xie, Jun and Shih, Jason and Tai, Yu-Chong (2003) Integrated surface-micromachined mass flow controller. In: The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE , Piscataway, NJ, pp. 20-23. ISBN 0-7803-7744-3.

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An integrated surface-micromachined mass flow controller (MFC) that consists of an electrostatically actuated microvalve and a thermal flow sensor is presented here. With a unique design and utilizing a multilayer Parylene process, the active microvalve and the flow sensor are integrated onto a single chip to perform closed-loop flow control. Sensitivity of the flow sensor is 55 μV/(μ/L/min) for airflow and 12.2 μV/(nL/min) for water. The valve is actuated with a 10 kHz AC signal and an applied pressure of 21 kPa can be sealed with an actuation voltage of 200 V_peak (±200 V). For flow control, both Pulse Width Modulation (PWM) and actuation voltage adjustment are demonstrated. PWM shows better performance in terms of controllability and linearity.

Item Type:Book Section
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Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 2003 IEEE. This work is supported in part by NSF ERC Center at Caltech (Grant No. EEC-9402726) and DARPA/MTO Bioflips Program. The authors would like to thank Mr. Trevor Roper for the assistance with fabrication and Dr. Yong Xu for the helpful discussion.
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Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Record Number:CaltechAUTHORS:20170518-125539929
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Official Citation:Jun Xie, J. Shih and Yu-Chong Tai, "Integrated surface-micromachined mass flow controller," The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE, Kyoto, Japan, 2003, pp. 20-23. doi: 10.1109/MEMSYS.2003.1189677
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:77581
Deposited On:18 May 2017 21:11
Last Modified:15 Nov 2021 17:32

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