Jung-Kubiak, Cecile and Sayers, Jack and Hollister, Matthew I. and Bose, Arjun and Yoshida, Hiroshige and Liao, Luke and Wong, Jonathan and Radford, Simon and Chattopadhyay, Goutam and Golwala, Sunil (2017) Antireflective textured silicon optics at millimeter and submillimeter wavelengths. In: 11th European Conference on Antennas and Propagation (EUCAP). IEEE , Piscataway, NJ, pp. 955-961. ISBN 978-8-8907-0187-0. http://resolver.caltech.edu/CaltechAUTHORS:20170524-164519696
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Abstract
Silicon optics with broadband antireflective (AR) treatments are being developed for millimeter and submillimeter-wave applications. Combined photolithography and deep reactive ion etching (DRIE) techniques are used to texture the surfaces of high resistivity, low loss silicon wafers. We report on the design, fabrication, and testing at 250 GHz of single and double layer AR treatments on silicon optics.
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| Additional Information: | © 2017 IEEE. This research was carried out with partial support from NASA (NNX15AE01G) at the California Institute of Technology, the Caltech Submillimeter Observatory Hilo office, and at the Jet Propulsion Laboratory, operated by the California Institute of Technology under a contract with the National Aeronautics and Space Administration. | |||||||||
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| Subject Keywords: | silicon optics, lens es, antireflective, submillimeter-wave, millimeter-wave, microfabrication, DRIE | |||||||||
| Record Number: | CaltechAUTHORS:20170524-164519696 | |||||||||
| Persistent URL: | http://resolver.caltech.edu/CaltechAUTHORS:20170524-164519696 | |||||||||
| Official Citation: | C. Jung-Kubiak et al., "Antireflective textured silicon optics at millimeter and submillimeter wavelengths," 2017 11th European Conference on Antennas and Propagation (EUCAP), Paris, France, 2017, pp. 959-961. doi: 10.23919/EuCAP.2017.7928608 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 77741 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Kristin Buxton | |||||||||
| Deposited On: | 25 May 2017 16:25 | |||||||||
| Last Modified: | 25 May 2017 16:25 |
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