Wang, Xuan-Qi and Yang, Xing and Walsh, Ken and Tai, Yu-Chong (1997) Gas-phase Silicon Etching With Bromine Trifluoride. In: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). Vol.2. IEEE , Piscataway, NJ, pp. 1505-1508. ISBN 0-7803-3829-4. https://resolver.caltech.edu/CaltechAUTHORS:20170525-161134683
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Abstract
We report the first study of gas phase silicon micromachining using pure bromine trifluoride (BrF/sub 3/) gas at room temperature. This work includes both the design of a new apparatus and etching characterization. Consistent etching results and high molecular etching efficiency (80%) have been achieved by performing the etching in a controlled pulse mode. This pure gaseous BrF/sub 3/ etching process is isotropic and has a high etch rate with superb selectivity over silicon dioxide (3000:1), silicon nitride (400-800:1) and photoresist (1000:1). Moreover, gaseous BrF/sub 3/ etching has also been demonstrated in surface micromachining process, where silicon nitride channels and membranes using polysilicon as the sacrificial layer have been successfully fabricated.
| Item Type: | Book Section | |||||||||
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| Additional Information: | © 1997 IEEE. The authors would like to thank Trevor Roper, Larry Begay for help with the system setup and Tomas Tsao, Charles Grosjean with helpful discussions. | |||||||||
| Subject Keywords: | Silicon, Reservoirs, Temperature, Valves, Nitrogen, Safety, Dry etching, Chemical processes, Differential equations, Xenon | |||||||||
| DOI: | 10.1109/SENSOR.1997.635751 | |||||||||
| Record Number: | CaltechAUTHORS:20170525-161134683 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20170525-161134683 | |||||||||
| Official Citation: | Xuan-Qi Wang, Xing Yang, K. Walsh and Yu-Chong Tai, "Gas-phase silicon etching with bromine trifluoride," Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, Chicago, IL, 1997, pp. 1505-1508 vol.2. doi: 10.1109/SENSOR.1997.635751 | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 77777 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | INVALID USER | |||||||||
| Deposited On: | 26 May 2017 17:46 | |||||||||
| Last Modified: | 15 Nov 2021 17:33 |
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