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A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems

Liu, Chang and Tsao, Thomas and Tai, Yu-Chong and Liu, Wenheng and Will, Peter and Ho, Chih-Ming (1995) A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems. In: Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. Vol.1. IEEE , Piscatway, NJ, pp. 328-331. ISBN 91-630-3473-5. https://resolver.caltech.edu/CaltechAUTHORS:20170525-170153415

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Abstract

Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm x 1 mm X 5µm in size together with polysilicon bending supports. Experimentally, it can lift a 87 µN (or 8.88 mg) force under a magnetic field of approximately 2 x 10^4 A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
https://doi.org/10.1109/SENSOR.1995.717185DOIArticle
http://ieeexplore.ieee.org/document/717185/PublisherArticle
ORCID:
AuthorORCID
Tai, Yu-Chong0000-0001-8529-106X
Additional Information:© 1995 IEEE.
DOI:10.1109/SENSOR.1995.717185
Record Number:CaltechAUTHORS:20170525-170153415
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170525-170153415
Official Citation:Chang Liu, T. Tsao, Yu-Chong Tai, Wenheng Liu, P. Will and Chih-Ming Ho, "A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems," Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on, 1995, pp. 328-331. doi: 10.1109/SENSOR.1995.717185
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:77783
Collection:CaltechAUTHORS
Deposited By: Kristin Buxton
Deposited On:26 May 2017 17:35
Last Modified:15 Nov 2021 17:33

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