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Bridging ultrahigh-Q devices and photonic circuits

Yang, Ki Youl and Oh, Dong Yoon and Lee, Seung Hoon and Yang, Qi-Fan and Yi, Xu and Shen, Boqiang and Wang, Heming and Vahala, Kerry (2018) Bridging ultrahigh-Q devices and photonic circuits. Nature Photonics, 12 (5). pp. 297-302. ISSN 1749-4885. doi:10.1038/s41566-018-0132-5.

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Optical microresonators are essential to a broad range of technologies and scientific disciplines. However, many of their applications rely on discrete devices to attain challenging combinations of ultra-low-loss performance (ultrahigh Q) and resonator design requirements. This prevents access to scalable fabrication methods for photonic integration and lithographic feature control. Indeed, finding a microfabrication bridge that connects ultrahigh-Q device functions with photonic circuits is a priority of the microcavity field. Here, an integrated resonator having a record Q factor over 200 million is presented. Its ultra-low-loss and flexible cavity design brings performance to integrated systems that has been the exclusive domain of discrete silica and crystalline microcavity devices. Two distinctly different devices are demonstrated: soliton sources with electronic repetition rates and high-coherence/low-threshold Brillouin lasers. This multi-device capability and performance from a single integrated cavity platform represents a critical advance for future photonic circuits and systems.

Item Type:Article
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URLURL TypeDescription ReadCube access Paper
Yang, Ki Youl0000-0002-0587-3201
Oh, Dong Yoon0000-0001-6716-1851
Yang, Qi-Fan0000-0002-7036-1712
Yi, Xu0000-0002-2485-1104
Shen, Boqiang0000-0003-0697-508X
Wang, Heming0000-0003-3861-0624
Vahala, Kerry0000-0003-1783-1380
Alternate Title:Integrated Ultra-High-Q Optical Resonator, Bridging ultra-high-Q devices and photonic circuits
Additional Information:© 2018 Macmillan Publishers Limited, part of Springer Nature. Received: 10 September 2017; Accepted: 12 February 2018; Published online: 19 March 2018. Data availability: The data that support the plots within this paper and other findings of this study are available from the corresponding author upon reasonable request. We thank O. Painter and B. Baker for assistance with the PECVD silicon nitride process, H. Atwater and W.-H. Cheng for assistance with silica atomic layer deposition, M. Hunt for assistance with electron-beam microscopy, Y.-H. Lai for technical assistance, and A. Matsko and J. Bowers for helpful discussions. We also gratefully acknowledge the Defense Advanced Research Projects Agency under the DODOS (award no. HR0011-15-C-0055, sub award KK1540) and PRIGM:AIMS (grant no. N66001-16-1-4046) programs and the Kavli Nanoscience Institute. Author Contributions: K.Y.Y., D.Y.O., S.H.L. and K.V. conceived the fabrication process and resonator design. K.Y.Y., D.Y.O. and S.H.L. fabricated and tested the resonator structures with assistance from B.S. and H.W. K.Y.Y., D.Y.O., S.H.L., Q.F.Y., X.Y., B.S. and H.W. conducted soliton and Brillouin laser measurements. All authors analysed the data and contributed to writing the manuscript. The authors declare no competing interests.
Group:Kavli Nanoscience Institute
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)HR0011-15-C-0055
Office of Naval Research (ONR)N66001-16-1-4046
Kavli Nanoscience InstituteUNSPECIFIED
Issue or Number:5
Record Number:CaltechAUTHORS:20170619-095450945
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:78326
Deposited By: Tony Diaz
Deposited On:19 Jun 2017 17:30
Last Modified:15 Nov 2021 17:38

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