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Micropatterning of metal oxide nanofibers by electrohydrodynamic (EHD) printing towards highly integrated and multiplexed gas sensor applications

Kang, Kyungnam and Yang, Daejong and Park, Jaeho and Kim, Sanghyeok and Cho, Incheol and Yang, Hyun-Ho and Cho, Minkyu and Mousavi, Saeb and Choi, Kyung Hyun and Park, Inkyu (2017) Micropatterning of metal oxide nanofibers by electrohydrodynamic (EHD) printing towards highly integrated and multiplexed gas sensor applications. Sensors and Actuators B: Chemical, 250 . pp. 574-583. ISSN 0925-4005. http://resolver.caltech.edu/CaltechAUTHORS:20170628-155605776

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Abstract

Integration of heterogeneous sensing materials in microelectronic devices is essential to accomplish compact and highly integrated environmental sensors. For this purpose, a micro-patterning method of electrospun metal oxide nanofibers based on electrohydrodynamic (EHD) printing process was developed in this work. Several types of metal oxide (SnO_2, In_2O_3, WO_3 and NiO) nanofibers that were produced by electrospinning, fragmented into smaller pieces by ultrasonication, and dissolved in organic solvents were utilized as inks for the printing. Constant or pulsed wave bias consisting of base and jetting voltages were applied between a nozzle and a substrate to generate a jetting of nanofiber solutions. Several parameters for EHD printing such as pulse width, inner diameter of the nozzle, distance from the nozzle to the substrate, and stage speed, were optimized for accurate micro-patterning of electrospun nanofibers. By using optimized printing parameters, microscale patterns of electrospun nanofibers with a minimum diameter less than 50 μm could be realized. Gas sensors were fabricated by EHD printing on the microelectrodes and then used for the detection of toxic gases such as NO_2, CO and H_2S. Four kinds of metal oxides could detect down to 0.1 ppm of NO_2, 1 ppm of H_2S and 20 ppm of CO gases. Also, heterogeneous nanofiber gas sensor array was fabricated by the same printing method and could detect NO_2 using the sensor array platform with microheaters. Furthermore, microscale patterns of nanofibers by EHD printing could be applied to the suspended MEMS platform without any structural damage and this sensor array could detect NO_2 and H_2S gases with 20 mW power consumption.


Item Type:Article
Related URLs:
URLURL TypeDescription
https://doi.org/10.1016/j.snb.2017.04.194DOIArticle
http://www.sciencedirect.com/science/article/pii/S0925400517308110PublisherArticle
ORCID:
AuthorORCID
Yang, Daejong0000-0002-8774-5843
Park, Inkyu0000-0001-5761-7739
Additional Information:© 2017 Elsevier B.V. Received 5 March 2017, Revised 26 April 2017, Accepted 28 April 2017, Available online 1 May 2017.
Subject Keywords:Metal oxide nanofiber; Chemiresistive gas sensor; Gas sensor array; MEMS; Electrohydrodynamic (EHD) printing; Electrospinning
Record Number:CaltechAUTHORS:20170628-155605776
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20170628-155605776
Official Citation:Kyungnam Kang, Daejong Yang, Jaeho Park, Sanghyeok Kim, Incheol Cho, Hyun-Ho Yang, Minkyu Cho, Saeb Mousavi, Kyung Hyun Choi, Inkyu Park, Micropatterning of metal oxide nanofibers by electrohydrodynamic (EHD) printing towards highly integrated and multiplexed gas sensor applications, Sensors and Actuators B: Chemical, Volume 250, October 2017, Pages 574-583, ISSN 0925-4005, https://doi.org/10.1016/j.snb.2017.04.194. (http://www.sciencedirect.com/science/article/pii/S0925400517308110)
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:78678
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:29 Jun 2017 01:42
Last Modified:14 Sep 2017 22:13

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