CaltechAUTHORS
  A Caltech Library Service

Applications of gallium nitride in MEMS and acoustic microsystems

Rais-Zadeh, Mina and Zhu, Haoshen and Ansari, Azadeh (2017) Applications of gallium nitride in MEMS and acoustic microsystems. In: 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF). IEEE , New York, NY, pp. 9-11. ISBN 978-1-5090-5237-0. http://resolver.caltech.edu/CaltechAUTHORS:20170629-121707529

Full text is not posted in this repository. Consult Related URLs below.

Use this Persistent URL to link to this item: http://resolver.caltech.edu/CaltechAUTHORS:20170629-121707529

Abstract

This paper covers various sensors and microsystems based on gallium nitride (GaN) micro mechanical (acoustic) resonators. III-nitrides have been a subject of extensive research for power electronics as well as photonics applications but their use in micro-electromechanical systems (MEMS) has been limited. In this paper, basic material properties of this group of materials (GaN, AlGaN, and other III-nitrides) are discussed and their current and future applications in MEMS and Microwave circuits are detailed.


Item Type:Book Section
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1109/SIRF.2017.7874356DOIArticle
http://ieeexplore.ieee.org/document/7874356/?part=1PublisherArticle
Additional Information:© 2017 IEEE. Date Added to IEEE Xplore: 09 March 2017. This work is supported by the ONR under the Young Investigator Program.
Funders:
Funding AgencyGrant Number
Office of Naval Research (ONR)UNSPECIFIED
Subject Keywords:Gallium nitride, MEMS, non-reciprocal, resonant body transistors, resonators
Record Number:CaltechAUTHORS:20170629-121707529
Persistent URL:http://resolver.caltech.edu/CaltechAUTHORS:20170629-121707529
Official Citation:M. Rais-Zadeh, H. Zhu and A. Ansari, "Applications of gallium nitride in MEMS and acoustic microsystems," 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF), Phoenix, AZ, 2017, pp. 9-11. doi: 10.1109/SIRF.2017.7874356
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:78694
Collection:CaltechAUTHORS
Deposited By: Ruth Sustaita
Deposited On:30 Jun 2017 17:38
Last Modified:30 Jun 2017 17:38

Repository Staff Only: item control page