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Zeptogram-Scale Nanomechanical Mass Sensing

Yang, Y. T. and Callegari, C. and Feng, X. L. and Ekinci, K. L. and Roukes, M. L. (2006) Zeptogram-Scale Nanomechanical Mass Sensing. Nano Letters, 6 (4). pp. 583-586. ISSN 1530-6984. https://resolver.caltech.edu/CaltechAUTHORS:20170710-155824443

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Abstract

Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor ∼20 zg. Our best mass resolution corresponds to ∼7 zg, equivalent to ∼30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate sensitivity of such devices based on these experimental results indicates that NEMS can ultimately provide inertial mass sensing of individual intact, electrically neutral macromolecules with single-Dalton (1 amu) resolution.


Item Type:Article
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1021/nl052134mDOIArticle
http://pubs.acs.org/doi/abs/10.1021/nl052134mPublisherArticle
ORCID:
AuthorORCID
Roukes, M. L.0000-0002-2916-6026
Additional Information:© 2006 American Chemical Society. Received October 29, 2005; Revised Manuscript Received February 5, 2006. Publication Date (Web): March 15, 2006. We gratefully acknowledge support from DARPA MTO under Grant DABT63-98-1-0012, from DARPA/SPAWAR under Grant N66001-02-1-8914, and from the NSF under Grant ECS-0089061.
Funders:
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)DABT63-98-1-0012
Office of Naval Research (ONR)N66001-02-1-8914
NSFECS-0089061
Issue or Number:4
Record Number:CaltechAUTHORS:20170710-155824443
Persistent URL:https://resolver.caltech.edu/CaltechAUTHORS:20170710-155824443
Official Citation:Zeptogram-Scale Nanomechanical Mass Sensing. Y. T. Yang, C. Callegari, X. L. Feng, K. L. Ekinci, and M. L. Roukes Nano Letters 2006 6 (4), 583-586 DOI: 10.1021/nl052134m
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:78916
Collection:CaltechAUTHORS
Deposited By: Tony Diaz
Deposited On:10 Jul 2017 23:32
Last Modified:03 Oct 2019 18:13

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