Jung, Gun-Young and Johnston-Halperin, Ezekiel and Wu, Wei-Li and Yu, Zhaoning and Wang, Shih-Yuan and Tong, William M. and Li, Zhiyong and Green, Jonathan E. and Sheriff, Bonnie A. and Boukai, Akram and Bunimovich, Yuri and Heath, James R. and Williams, R. Stanley (2006) Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography. Nano Letters, 6 (3). pp. 351-354. ISSN 1530-6984. doi:10.1021/nl052110f. https://resolver.caltech.edu/CaltechAUTHORS:20170801-152203233
Full text is not posted in this repository. Consult Related URLs below.
Use this Persistent URL to link to this item: https://resolver.caltech.edu/CaltechAUTHORS:20170801-152203233
Abstract
High density metal cross bars at 17 nm half-pitch were fabricated by nanoimprint lithography. Utilizing the superlattice nanowire pattern transfer technique, a 300-layer GaAs/AlGaAs superlattice was employed to produce an array of 150 Si nanowires (15 nm wide at 34 nm pitch) as an imprinting mold. A successful reproduction of the Si nanowire pattern was demonstrated. Furthermore, a cross-bar platinum nanowire array with a cell density of approximately 100 Gbit/cm^2 was fabricated by two consecutive imprinting processes.
| Item Type: | Article | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Related URLs: |
| |||||||||
| ORCID: |
| |||||||||
| Additional Information: | © 2006 American Chemical Society. Received 26 October 2005. Published online 4 February 2006. Published in print 1 March 2006. This research was supported in part by the Defense Advanced Research Projects Agency (DARPA) and through a subcontract from Mitre Corp. | |||||||||
| Funders: |
| |||||||||
| Issue or Number: | 3 | |||||||||
| DOI: | 10.1021/nl052110f | |||||||||
| Record Number: | CaltechAUTHORS:20170801-152203233 | |||||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechAUTHORS:20170801-152203233 | |||||||||
| Official Citation: | Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography Gun-Young Jung, Ezekiel Johnston-Halperin, Wei Wu, Zhaoning Yu, Shih-Yuan Wang, William M. Tong, Zhiyong Li, Jonathan E. Green, Bonnie A. Sheriff, Akram Boukai, Yuri Bunimovich, James R. Heath, and R. Stanley Williams Nano Letters 2006 6 (3), 351-354 DOI: 10.1021/nl052110f | |||||||||
| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | |||||||||
| ID Code: | 79713 | |||||||||
| Collection: | CaltechAUTHORS | |||||||||
| Deposited By: | Ruth Sustaita | |||||||||
| Deposited On: | 02 Aug 2017 17:44 | |||||||||
| Last Modified: | 15 Nov 2021 17:50 |
Repository Staff Only: item control page
