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Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography

Jung, Gun-Young and Johnston-Halperin, Ezekiel and Wu, Wei-Li and Yu, Zhaoning and Wang, Shih-Yuan and Tong, William M. and Li, Zhiyong and Green, Jonathan E. and Sheriff, Bonnie A. and Boukai, Akram and Bunimovich, Yuri and Heath, James R. and Williams, R. Stanley (2006) Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography. Nano Letters, 6 (3). pp. 351-354. ISSN 1530-6984. doi:10.1021/nl052110f.

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High density metal cross bars at 17 nm half-pitch were fabricated by nanoimprint lithography. Utilizing the superlattice nanowire pattern transfer technique, a 300-layer GaAs/AlGaAs superlattice was employed to produce an array of 150 Si nanowires (15 nm wide at 34 nm pitch) as an imprinting mold. A successful reproduction of the Si nanowire pattern was demonstrated. Furthermore, a cross-bar platinum nanowire array with a cell density of approximately 100 Gbit/cm^2 was fabricated by two consecutive imprinting processes.

Item Type:Article
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Wu, Wei-Li0000-0003-2610-1881
Heath, James R.0000-0001-5356-4385
Additional Information:© 2006 American Chemical Society. Received 26 October 2005. Published online 4 February 2006. Published in print 1 March 2006. This research was supported in part by the Defense Advanced Research Projects Agency (DARPA) and through a subcontract from Mitre Corp.
Funding AgencyGrant Number
Defense Advanced Research Projects Agency (DARPA)UNSPECIFIED
Mitre CorporationUNSPECIFIED
Issue or Number:3
Record Number:CaltechAUTHORS:20170801-152203233
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Official Citation:Circuit Fabrication at 17 nm Half-Pitch by Nanoimprint Lithography Gun-Young Jung, Ezekiel Johnston-Halperin, Wei Wu, Zhaoning Yu, Shih-Yuan Wang, William M. Tong, Zhiyong Li, Jonathan E. Green, Bonnie A. Sheriff, Akram Boukai, Yuri Bunimovich, James R. Heath, and R. Stanley Williams Nano Letters 2006 6 (3), 351-354 DOI: 10.1021/nl052110f
Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:79713
Deposited By: Ruth Sustaita
Deposited On:02 Aug 2017 17:44
Last Modified:15 Nov 2021 17:50

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